المؤلفون: Li, Chunlian, Cao, Ji, Zhang, Zhenwei, Li, JianChao, Wang, Lu, He, Qing, Zhang, Cunlin

المساهمون: Zhang, Xi-Cheng, Tani, Masahiko, Zhang, Cunlin

المصدر: Infrared, Millimeter-Wave, and Terahertz Technologies VIII

الإتاحة: https://doi.org/10.1117/12.2604059Test

المؤلفون: Li, Lanlan, Hu, Song, Zhao, Lixin, Li, Jianchao, Zhang, Xiongxing

المساهمون: Liu, Jennifer

المصدر: International Conference on Optoelectronic and Microelectronic Technology and Application

الإتاحة: https://doi.org/10.1117/12.2585207Test

المؤلفون: Lixin Zhao, Li Jianchao, Zhang Xiongxing, Song Hu, Lanlan Li

المصدر: International Conference on Optoelectronic and Microelectronic Technology and Application.

مصطلحات موضوعية: Tracking error, Computer science, Control system, Synchronization (computer science), Reticle, Electronic engineering, Wafer, Tracking (particle physics), Focus (optics), Lithography

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::9776e40616105c1b9e4ce811a394db7cTest
https://doi.org/10.1117/12.2585207Test

المؤلفون: Li, Jianchao, Zhang, Haifeng, Doerr, David, Alexander, Dennis R.

المساهمون: Sjöqvist, Lars J., Wilson, Rebecca A., Merlet, Thomas J.

المصدر: SPIE Proceedings ; Advanced Free-Space Optical Communication Techniques/Applications II and Photonic Components/Architectures for Microwave Systems and Displays ; ISSN 0277-786X

الإتاحة: https://doi.org/10.1117/12.690618Test

المؤلفون: Zhang, Haifeng, Li, Jianchao, Alexander, Dennis R., Doerr, Dave, Rao Tadepalli, Nageswara

المساهمون: Powers, Peter E.

المصدر: Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications V ; SPIE Proceedings ; ISSN 0277-786X

الإتاحة: https://doi.org/10.1117/12.648298Test