We develope a simple method to stabilize the beam during propagation. Combination of the self-developed control module and the large diameter mirrors reconstruct the beam stabilization system, and some important procedures are presented, such as calibration and average filter. The results show that the horizontal pointing and vertical pointing are stabilized to within 8.43 and 7.59 μrad, and the beam horizontal position and vertical position are stabilized to within 2.16 and 2.11 μm respectively. The regulating time is within 84 ms. Thus the method presented is effective for the current stabilization system applied in lithography tools.
