Modeling of Two-Dimensional Radio-Frequency Methane Glow Discharge in Cylindrical Geometry
| العنوان: | Modeling of Two-Dimensional Radio-Frequency Methane Glow Discharge in Cylindrical Geometry |
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| المؤلفون: | Bakhtier Farouk, Kallol Bera, Young H. Lee |
| المصدر: | JSME International Journal Series B. 41:429-435 |
| بيانات النشر: | Japan Society of Mechanical Engineers, 1998. |
| سنة النشر: | 1998 |
| مصطلحات موضوعية: | Fluid Flow and Transfer Processes, Glow discharge, Materials science, Mechanical Engineering, Direct current, Polyatomic ion, Plasma, Electric discharge in gases, Ion, Physics::Plasma Physics, Electric field, Electronic engineering, Deposition (phase transition), Physical and Theoretical Chemistry, Atomic physics |
| الوصف: | A self-consistent two-dimensional three moment radio-frequency glow discharge model has been developed for methane feed gas using a fluid model to study the charged species dynamics and its effects on deposition in a polyatomic gas discharge. Swarm data as a function of electron energy are provided as input to the model. The discharge is electropositive since positive ion density is more than negative ion density. The importance of two-dimensional modeling has been emphasized by comparing the plasma variables with those of a one-dimensional model. The model predicts both the radial and axial variations of species densities, electron energy and electric field. The off-axis maxima in species densities, typical for two-dimensional discharge, can be observed. The asymmetry of the discharge generates a self dc bias that has been predicted by a trial and error method. The model also calculates the radial variations of species fluxes to the cathode that are important to predict the film deposition. |
| تدمد: | 1347-5371 1340-8054 |
| الوصول الحر: | https://explore.openaire.eu/search/publication?articleId=doi_________::0af111a1c35d96cbea71d7be205d0ef9Test https://doi.org/10.1299/jsmeb.41.429Test |
| حقوق: | OPEN |
| رقم الانضمام: | edsair.doi...........0af111a1c35d96cbea71d7be205d0ef9 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 13475371 13408054 |
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