207 Micro/nano-imprint of glass by diamond mold
العنوان: | 207 Micro/nano-imprint of glass by diamond mold |
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المؤلفون: | Kazutoshi Kobayashi, Masaharu Komori, Hiroaki Uchiyama, Hiromichi Takebe, Tadahiko Maekawa, Takahisa Kusuura |
المصدر: | The Proceedings of The Manufacturing & Machine Tool Conference. :29-30 |
بيانات النشر: | Japan Society of Mechanical Engineers, 2006. |
سنة النشر: | 2006 |
مصطلحات موضوعية: | Materials science, Metallurgy, Chemical vapor deposition |
تدمد: | 2424-3094 |
الوصول الحر: | https://explore.openaire.eu/search/publication?articleId=doi_________::31cd97e2877267e8355c21b2216a1cf4Test https://doi.org/10.1299/jsmemmt.2006.6.29Test |
رقم الانضمام: | edsair.doi...........31cd97e2877267e8355c21b2216a1cf4 |
قاعدة البيانات: | OpenAIRE |
تدمد: | 24243094 |
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