المؤلفون: Jipeng Wang, Hesuan Hu, Chunrong Pan, Liang Li

المصدر: IEEE Access, Vol 9, Pp 50093-50105 (2021)

مصطلحات موضوعية: Cluster tool, semiconductor manufacturing, wafer fabrication, scheduling, transient process, wafer revisiting, Electrical engineering. Electronics. Nuclear engineering, TK1-9971

وصف الملف: electronic resource

العلاقة: https://ieeexploreTest.ieee.org/document/9389780/; https://doaj.org/toc/2169-3536Test

الوصول الحر: https://doaj.org/article/94097b95d06d4f24a4c953625d7f4fcbTest

المؤلفون: Yanjun Lu, Yan Qiao, Chunrong Pan, Yufeng Chen, Naiqi Wu, Zhiwu Li, Bin Liu

المصدر: IEEE Access, Vol 9, Pp 70868-70883 (2021)

مصطلحات موضوعية: Cluster tool, Petri nets, semiconductor manufacturing, wafer fabrication, Electrical engineering. Electronics. Nuclear engineering, TK1-9971

وصف الملف: electronic resource

العلاقة: https://ieeexploreTest.ieee.org/document/9422735/; https://doaj.org/toc/2169-3536Test

الوصول الحر: https://doaj.org/article/25779f8f2ed2476a9062d97c815920d1Test

المؤلفون: Qinghua Zhu, Naiqi Wu, Yan Qiao, Mengchu Zhou

المصدر: IEEE Access, Vol 4, Pp 2096-2109 (2016)

مصطلحات موضوعية: Cluster tool, Petri net (PN), Scheduling, Semiconductor manufacturing, Electrical engineering. Electronics. Nuclear engineering, TK1-9971

وصف الملف: electronic resource

العلاقة: https://ieeexploreTest.ieee.org/document/7445820/; https://doaj.org/toc/2169-3536Test

الوصول الحر: https://doaj.org/article/f8735fc762474f02bbb2e516bdeabb3aTest

المؤلفون: Bin Liu, Chunrong Pan, Zhiwu Li, YuFeng Chen, Yanjun Lu, Yan Qiao, Naiqi Wu

المصدر: IEEE Access, Vol 9, Pp 70868-70883 (2021)

مصطلحات موضوعية: Flexibility (engineering), semiconductor manufacturing, 0209 industrial biotechnology, General Computer Science, Computer science, Semiconductor device fabrication, Distributed computing, General Engineering, Process (computing), Petri nets, 02 engineering and technology, Deadlock, Petri net, wafer fabrication, TK1-9971, 020901 industrial engineering & automation, 0202 electrical engineering, electronic engineering, information engineering, Cluster (physics), 020201 artificial intelligence & image processing, General Materials Science, Wafer, State (computer science), Electrical engineering. Electronics. Nuclear engineering, Cluster tool

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::82ed1af22e4b738e5b0bcf158facd95fTest
https://ieeexploreTest.ieee.org/document/9422735/

المؤلفون: Lee, Tae-Eog, Lee, Hwan-Yong, Sreenivas, Ramavarapu S.

مصطلحات موضوعية: timed event graph, token delay, workload balancing, cluster tool, wafer delay, manag, geo

العلاقة: http://hdl.handle.net/10203/7410Test

الإتاحة: http://hdl.handle.net/10203/7410Test

المؤلفون: Zheng XH(郑秀红), Hu JT(胡静涛), Yu HB(于海斌)

المصدر: Zheng XH,Hu JT,Yu HB. The Research of the Stochastic Reward Net Model for the Cluster Tool in Serial-parallel Mode[C]. 见:2011 International Conference on Electric Information and Control Engineering. Wuhan, China. April 15-17, 2011. ; Zheng XH,Hu JT,Yu HB. The Research of the Stochastic Reward Net Model for the Cluster Tool in Serial-parallel Mode[C]. 2011 International Conference on Electric Information and Control Engineering. Wuhan, China. April 15-17, 2011.The Research of the Stochastic Reward Net Model for the Cluster Tool in Serial-parallel Mode.

مصطلحات موضوعية: The cluster tool, serial-parallel, stochastic reward net, throughput, model

العلاقة: http://ir.sia.cn/handle/173321/8424Test

الإتاحة: http://ir.sia.cn/handle/173321/8424Test