التفاصيل البيبلوغرافية
| العنوان: |
Single pulse femtosecond laser ablation of silicon -- a comparison between experimental and simulated two-dimensional ablation profiles. |
| المؤلفون: |
Moser, Regina, Domke, Matthias, Winter, Jan, Huber, Heinz P., Marowsky, Gerd |
| المصدر: |
Advanced Optical Technologies; Aug2018, Vol. 7 Issue 4, p255-264, 10p |
| مصطلحات موضوعية: |
ULTRASHORT laser pulses, FEMTOSECOND lasers, LASER ablation, SILICON, HYDRODYNAMICS |
| مستخلص: |
Ultrashort laser pulses are widely used for the precise structuring of semiconductors like silicon (Si). We present here, for the first time, a comparative study of experimentally obtained and numerically simulated two-dimensional ablation profiles based on parameters of commercially relevant and widely used near-infrared and diode pumped femtosecond lasers. Single pulse laser ablation was studied at a center wavelength of 1040 nm and pulse duration of 380 fs (FWHM) in an irradiating fluence regime from 1 J/cm² to 10 J/cm². Process thresholds for material transport and removal were determined. Three regimes, scaling with the fluence, could be identified: low and middle fluence regimes and a hydrodynamic motion regime. By comparing the simulated and experimental ablation profiles, two conclusions can be drawn: At 2 J/cm², the isothermal profile of 3800 K is in excellent agreement with the observed two-dimensional ablation. Thus exceeding a temperature of 3800 K can be accepted as a simplified ablation condition at that fluence. Furthermore, we observed a distinct deviation of the experimental from the simulated ablation profiles for irradiated fluences above 4 J/cm². This points to hydrodynamic motion as an important contributing mechanism for laser ablation at higher fluences. [ABSTRACT FROM AUTHOR] |
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