دورية أكاديمية
Influence of the sputtering pressure on the morphological features and electrical resistivity anisotropy of nanostructured titanium films
| العنوان: | Influence of the sputtering pressure on the morphological features and electrical resistivity anisotropy of nanostructured titanium films |
|---|---|
| المؤلفون: | Pedrosa, Paulo Eduardo Teixeira Baptista, Ferreira, Armando José Barros, Cote, Jean-Marc, Martin, Nicolas, Yazdi, Mohammad Arab Pour, Billard, Alain, Lanceros-Méndez, S., Vaz, F. |
| بيانات النشر: | Elsevier Science BV |
| سنة النشر: | 2017 |
| المجموعة: | Universidade of Minho: RepositóriUM |
| مصطلحات موضوعية: | Glancing angle deposition, Titanium, Nanostructured films, Anisotropy, Electrical resistivity, Science & Technology |
| الوصف: | Titanium films were DC sputtered with a particle flux incidence angle of 80 degrees, using the Glancing Angle Deposition (GLAD) technique with increasing sputtering pressures from 0.2 to 1.5 Pa. This range of pressures is typically implemented for the deposition of thin films by the magnetron sputtering process. The main objective of this work was to study the anisotropic electrical resistivity behaviour of the different thin film nanostructures that were obtained. It is shown that low sputtering pressures (0.2-0.5 Pa) promote higher column angles beta with respect to the substrate normal (15 degrees <= beta <= 40 degrees), as well as better defined porous structures. On the other hand, intermediate and high pressures (0.6-0.8 Pa) originate secondary growth effects on the columnar structures perpendicular to the substrate normal (beta = 0 degrees). No defined columns can be seen when the films are sputtered using the highest pressure (1.5 Pa). The electrical resistivity is significantly affected by the differences in the columnar microstructure. Porous films exhibit higher room temperature (RT) resistivity values (0.95-1.5 x 10-5 Omega m), when compared to the more compact ones (0.6-0.9 x 10(-5) Omega m). When a temperature cycle of RT(25)-300-RT(25)degrees C was applied, a more significant oxidation is evidenced in the more porous structures, as well as a higher resistivity anisotropy (maximum of 1.6) than in the more compact ones (minimum of 1.25). ; This work was supported by the Region of Franche-Comte, the French RENATECH network and performed in cooperation with the Labex ACTION program (contract ANR-11-LABX-0101). Funding was also provided by the Portuguese Foundation for Science and Technology (FCT) in the framework of the Strategic Funding UID/FIS/04650/2013 and project PTDC/EEI-SII/5582/2014. Armando Ferreira acknowledges the FCT for the SFRH/BPD/102402/2014 grant. The authors thank financial support from the Basque Government Industry Department under the ELKARTEK Program. ... |
| نوع الوثيقة: | article in journal/newspaper |
| وصف الملف: | application/pdf |
| اللغة: | English |
| تدمد: | 0169-4332 |
| العلاقة: | info:eu-repo/grantAgreement/FCT/5876/147414/PT; PTD-C/EEI-SII/5582/2014; SFRH/BPD/102402/2014; http://hdl.handle.net/1822/52580Test |
| DOI: | 10.1016/j.apsusc.2017.05.175 |
| الإتاحة: | https://doi.org/10.1016/j.apsusc.2017.05.175Test http://hdl.handle.net/1822/52580Test |
| حقوق: | info:eu-repo/semantics/restrictedAccess |
| رقم الانضمام: | edsbas.B9650895 |
| قاعدة البيانات: | BASE |
| تدمد: | 01694332 |
|---|---|
| DOI: | 10.1016/j.apsusc.2017.05.175 |