المؤلفون: Busca, Roberta, Cimmino, Davide, Ferrero, Sergio, Scaltrito, Luciano, Pirri, Candido, Richieri, Giovanni, Carta, Rossano

المساهمون: Busca, Roberta, Cimmino, Davide, Ferrero, Sergio, Scaltrito, Luciano, Pirri, Candido, Richieri, Giovanni, Carta, Rossano

مصطلحات موضوعية: Materials Propertie, Metal, Semiconductor Device, Oxide, Passivation, Corrosion, Electrical Properties and Parameter, Dielectric Propertie, Semiconductor Material, Dielectric Materials

وصف الملف: ELETTRONICO

العلاقة: info:eu-repo/semantics/altIdentifier/wos/WOS:000569100800001; volume:38; issue:2; firstpage:022206; numberofpages:7; journal:JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. B, NANOTECHNOLOGY & MICROELECTRONICS; http://hdl.handle.net/11583/2791572Test; info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-85079501737; https://doi.org/10.1116/1.5121880Test

الإتاحة: https://doi.org/10.1116/1.5121880Test
http://hdl.handle.net/11583/2791572Test

المؤلفون: Greczynski, Grzegorz, Petrov, Ivan, Greene, Joseph E, Hultman, Lars

مصطلحات موضوعية: XPS, TiN, capping layers, oxidation protection, sputtering, surface passivation, Condensed Matter Physics, Den kondenserade materiens fysik

وصف الملف: application/pdf

العلاقة: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 0734-2101, 2015, 33, s. 05E101-1-05E101-9; orcid:0000-0002-4898-5115; orcid:0000-0002-2955-4897; orcid:0000-0002-2837-3656; http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-118598Test; ISI:000361229000001

الإتاحة: https://doi.org/10.1116/1.4916239Test
http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-118598Test

المؤلفون: Inho Seong, Shin-Jae You, Youngseok Lee, Jangjae Lee, Sijun Kim, Chulhee Cho, Sangho Lee

المصدر: Journal of Vacuum Science & Technology A. 40:013001

مصطلحات موضوعية: Materials science, Passivation, business.industry, Semiconductor device fabrication, Surfaces and Interfaces, Plasma, Condensed Matter Physics, Surfaces, Coatings and Films, Semiconductor, Etching (microfabrication), Deposition (phase transition), Fluorocarbon, Composite material, business, Layer (electronics)

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::2011dbaf21778d0ac7d8d1c5e19992e8Test
https://doi.org/10.1116/6.0001466Test

المؤلفون: Eric I. Altman, Sohrab Ismail-Beigi, Kayahan Saritas, Nassar Doudin

المصدر: Journal of Vacuum Science & Technology A. 39:062201

مصطلحات موضوعية: Materials science, Passivation, Oxide, Surfaces and Interfaces, Substrate (electronics), Condensed Matter Physics, Silicate, Surfaces, Coatings and Films, law.invention, chemistry.chemical_compound, Crystallography, chemistry, X-ray photoelectron spectroscopy, Electron diffraction, law, Scanning tunneling microscope, Layer (electronics)

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::16da3c2da4ed6eb952a604d6a24c0132Test
https://doi.org/10.1116/6.0001397Test

المؤلفون: Yang Ju, Yasuhiro Kimura

المصدر: Journal of Vacuum Science & Technology B. 39:062803

مصطلحات موضوعية: Materials science, Passivation, Process Chemistry and Technology, Delamination, Intermetallic, Nanowire, Electromigration, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Sputtering, Residual stress, Materials Chemistry, Electrical and Electronic Engineering, Deformation (engineering), Composite material, Instrumentation

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::52aac23c2cd76390b4448b13c683c63fTest
https://doi.org/10.1116/6.0001271Test

المؤلفون: Vijayakumar Murugesan, Vineet V. Joshi, Tamas Varga, Vaithiyalingam Shutthanandan, Olga A. Marina, Abraham Martinez, Arun Devaraj, Suntharampillai Thevuthasan, Swadipta Roy, Elizabeth V. Stephens

المصدر: Journal of Vacuum Science & Technology A. 39:063213

مصطلحات موضوعية: Materials science, Aqueous solution, Passivation, Magnesium, chemistry.chemical_element, Surfaces and Interfaces, Condensed Matter Physics, Surfaces, Coatings and Films, Corrosion, chemistry.chemical_compound, X-ray photoelectron spectroscopy, Chemical engineering, chemistry, Hydroxide, Grain boundary, Single crystal

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::2424dfd79cc605653dfb59e4f271fe03Test
https://doi.org/10.1116/6.0001305Test

المؤلفون: Sarah Puzycki, Yuanchang Zhang, Michael Barrow, S. P. Wright, Jamie Phillips, Piyush J. Shah, Robert Bedford

المصدر: Journal of Vacuum Science & Technology B. 39:052202

مصطلحات موضوعية: Materials science, Passivation, business.industry, Process Chemistry and Technology, Photoresist, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Etching (microfabrication), Materials Chemistry, Surface roughness, Optoelectronics, Undercut, Dry etching, Electrical and Electronic Engineering, Inductively coupled plasma, business, Instrumentation, Layer (electronics)

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::dc96ce1735d5cdd566764f3e38d2ac74Test
https://doi.org/10.1116/6.0001181Test

المؤلفون: Lars F. Voss, S. E. Harrison, Scott B. Donald, Catherine Reinhardt, Clint D. Frye

المصدر: Journal of Vacuum Science & Technology A. 39:053002

مصطلحات موضوعية: Materials science, Plasma etching, Passivation, Silicon, business.industry, chemistry.chemical_element, Surfaces and Interfaces, Chemical vapor deposition, Nitride, Condensed Matter Physics, Surfaces, Coatings and Films, chemistry.chemical_compound, chemistry, Etching (microfabrication), Silicon carbide, Optoelectronics, Wafer, business

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::a0dfc72d802c18a0c194a8e44885b366Test
https://doi.org/10.1116/6.0001123Test

المؤلفون: Masaru Nakagawa, Shunya Ito, Chiaki Miyajima

المصدر: Journal of Vacuum Science & Technology B. 39:052804

مصطلحات موضوعية: Materials science, Passivation, Process Chemistry and Technology, technology, industry, and agriculture, Substrate (electronics), Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Secondary ion mass spectrometry, Atomic layer deposition, stomatognathic system, Chemical engineering, Materials Chemistry, Dry etching, Electrical and Electronic Engineering, Reactive-ion etching, Ion milling machine, Instrumentation, Layer (electronics)

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::4aca50c6bc572dfbb3e1938caf34d1fcTest
https://doi.org/10.1116/6.0001250Test

المؤلفون: Natalia Acero, Eric A. Stach, Pawan Kumar, Deep Jariwala, Kelotchi S. Figueroa, Alexandre C. Foucher, Kiyoung Jo

المصدر: Journal of Vacuum Science & Technology A. 39:032201

مصطلحات موضوعية: Materials science, Photoluminescence, Passivation, chemistry.chemical_element, 02 engineering and technology, 010402 general chemistry, 01 natural sciences, symbols.namesake, chemistry.chemical_compound, Scanning transmission electron microscopy, Plasma processing, Argon, business.industry, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 0104 chemical sciences, Surfaces, Coatings and Films, Semiconductor, chemistry, Boron nitride, symbols, Optoelectronics, 0210 nano-technology, Raman spectroscopy, business

الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::a73dd41f5fe9108106e848870709e8e2Test
https://doi.org/10.1116/6.0000874Test