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المؤلفون: Tzer Min Lee, Ming Che Hsieh, Rex C.C. Wang
المصدر: Biointerphases. 6:87-97
مصطلحات موضوعية: Titanium, Materials science, Passivation, Biocompatibility, Surface Properties, General Physics and Astronomy, Polishing, Titanium alloy, Biocompatible Materials, Nanotechnology, General Chemistry, Surface finish, Fibroblasts, Cell morphology, General Biochemistry, Genetics and Molecular Biology, Cell Line, Biomaterials, Contact angle, Mice, Alloys, Animals, General Materials Science, Wetting, Composite material
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7b2af4ee6017afd414d55eb9461d5e54Test
https://doi.org/10.1116/1.3604528Test -
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المؤلفون: A. Amini, Morteza Fathipour, M. Mehran, S. Mohajerzadeh, Soheil Azimi, Amin Vali
المصدر: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 28:1125-1131
مصطلحات موضوعية: Materials science, Silicon, Passivation, business.industry, Process Chemistry and Technology, chemistry.chemical_element, Nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, Etching (microfabrication), Materials Chemistry, Deep reactive-ion etching, Optoelectronics, Dry etching, Electrical and Electronic Engineering, Reactive-ion etching, Silicon oxide, business, Instrumentation, Power density
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::c602bf0b8daf6e007b93499ff9e7ec13Test
https://doi.org/10.1116/1.3497033Test -
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المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:905-910
مصطلحات موضوعية: Fabrication, Materials science, Passivation, Silicon, business.industry, Hybrid silicon laser, Nanocrystalline silicon, chemistry.chemical_element, Nanotechnology, Surfaces and Interfaces, Substrate (electronics), Condensed Matter Physics, Surfaces, Coatings and Films, chemistry, Etching (microfabrication), Optoelectronics, Deposition (phase transition), business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::a7a5ed3e897501e440a5f70287d27a40Test
https://doi.org/10.1116/1.1943467Test -
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المؤلفون: Gerhard Franz, Eckard Deichsel
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 22:2201-2205
مصطلحات موضوعية: Materials science, Fabrication, Passivation, business.industry, Nanotechnology, Surfaces and Interfaces, Plasma, equipment and supplies, Condensed Matter Physics, Laser, Surfaces, Coatings and Films, Semiconductor laser theory, law.invention, Gallium arsenide, chemistry.chemical_compound, chemistry, Etching (microfabrication), law, Optoelectronics, business, Diode
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::d01fdb41cdfe9c5729820ef98805c577Test
https://doi.org/10.1116/1.1786307Test -
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المؤلفون: Jyrki Kiihamäki
المصدر: Kiihamäki, J 2000, ' Deceleration of silicon etch rate at high aspect ratios ', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 18, no. 4, pp. 1385-1389 . https://doi.org/10.1116/1.582359Test
مصطلحات موضوعية: Materials science, Silicon, Passivation, business.industry, Conductance, chemistry.chemical_element, Nanotechnology, Surfaces and Interfaces, Condensed Matter Physics, Aspect ratio (image), Surfaces, Coatings and Films, chemistry, Etch pit density, Etching (microfabrication), Deep reactive-ion etching, Optoelectronics, business, Deposition (law)
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b621ec869ae959397a2da6f1f75044a5Test
https://doi.org/10.1116/1.582359Test -
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المؤلفون: T. Tom Jiang, Cynthia A. Bradbury, Michael Canavan
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 18:1102-1106
مصطلحات موضوعية: Wire bonding, Materials science, Passivation, Nanotechnology, Surfaces and Interfaces, Adhesion, Condensed Matter Physics, Die (integrated circuit), Surfaces, Coatings and Films, X-ray photoelectron spectroscopy, Integrated circuit packaging, Composite material, Layer (electronics), Polyimide
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::544346a2f6d02735a20949dcdcdaf77dTest
https://doi.org/10.1116/1.582307Test -
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المؤلفون: Rudolf Hezel, Armin G. Aberle, Thomas Lauinger, Jens Moschner
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:530-543
مصطلحات موضوعية: Materials science, Silicon, Passivation, business.industry, Nanocrystalline silicon, chemistry.chemical_element, Nanotechnology, Surfaces and Interfaces, Chemical vapor deposition, Condensed Matter Physics, Surfaces, Coatings and Films, Monocrystalline silicon, chemistry.chemical_compound, Silicon nitride, chemistry, Plasma-enhanced chemical vapor deposition, Optoelectronics, Crystalline silicon, business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::0f802ea226629c426c6552b89771b0b8Test
https://doi.org/10.1116/1.581095Test -
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المصدر: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 34:041603
مصطلحات موضوعية: Materials science, Passivation, Process Chemistry and Technology, Oxide, chemistry.chemical_element, Germanium, Nanotechnology, 02 engineering and technology, 010402 general chemistry, 021001 nanoscience & nanotechnology, 01 natural sciences, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Resist, chemistry, Materials Chemistry, Surface modification, Electrical and Electronic Engineering, 0210 nano-technology, Instrumentation, Layer (electronics), Hydrogen silsesquioxane, Electron-beam lithography
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::533e416c75f839c2b3e3f380e83e3007Test
https://doi.org/10.1116/1.4948916Test -
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المؤلفون: Filippos Farmakis, Yufeng Hao, Ioannis Kymissis, Konstantinos Alexandrou, James Hone, Nikolaos Georgoulas, Alexandros Arapis
المصدر: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 34:041805
مصطلحات موضوعية: Materials science, Passivation, Annealing (metallurgy), chemistry.chemical_element, Nanotechnology, 02 engineering and technology, 01 natural sciences, Oxygen, law.invention, Aluminium, law, Desorption, 0103 physical sciences, Materials Chemistry, Electrical and Electronic Engineering, Instrumentation, 010302 applied physics, business.industry, Graphene, Process Chemistry and Technology, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, Optoelectronics, Field-effect transistor, 0210 nano-technology, business, Water vapor
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::9ef6a96fece593ef188525ac676fe2bcTest
https://doi.org/10.1116/1.4952409Test -
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المؤلفون: G. Lucovsky, Z. Lu, Klaus J. Bachmann, Nikolaus Dietz, S. Habermehl
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 12:990-994
مصطلحات موضوعية: Materials science, Passivation, Low-energy electron diffraction, Silicon, Analytical chemistry, chemistry.chemical_element, Nanotechnology, Surfaces and Interfaces, Chemical vapor deposition, Condensed Matter Physics, Epitaxy, Surfaces, Coatings and Films, chemistry, Remote plasma, Thin film, Vicinal
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::18c0ec350c28e1c178f97da16dc97236Test
https://doi.org/10.1116/1.579077Test