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1
المؤلفون: Jung H. Lee, Bakhtier Farouk, Young H. Lee
المصدر: Journal of Applied Physics. 79:7676-7681
مصطلحات موضوعية: Materials science, Hydrogen, Analytical chemistry, General Physics and Astronomy, chemistry.chemical_element, Dielectric, Plasma, Condensed Matter::Materials Science, symbols.namesake, chemistry, Ellipsometry, Condensed Matter::Superconductivity, Attenuation coefficient, symbols, Thin film, Raman spectroscopy, Refractive index
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::5e07a8a90076f3ea3b1b1f6bc469c24bTest
https://doi.org/10.1063/1.362432Test -
2
المؤلفون: Young H. Lee
المصدر: Applied Physics Letters. 73:1119-1121
مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Silicon, Annealing (metallurgy), Doping, chemistry.chemical_element, Molecular physics, law.invention, Ion, Condensed Matter::Soft Condensed Matter, Condensed Matter::Materials Science, Nuclear magnetic resonance, Ion implantation, chemistry, law, Condensed Matter::Superconductivity, Interstitial defect, Neutron, Electron paramagnetic resonance
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::08463704b0cf18896130f5a3a6a60ed0Test
https://doi.org/10.1063/1.122116Test -
3
المؤلفون: Dong S. Kim, Young H. Lee, Nae‐Hak Park
المصدر: Applied Physics Letters. 69:2776-2778
مصطلحات موضوعية: Hexamethyldisiloxane, Materials science, Argon, Physics and Astronomy (miscellaneous), chemistry.chemical_element, Dielectric, Amorphous solid, chemistry.chemical_compound, Monomer, chemistry, Chemical engineering, Organic chemistry, Thermal stability, Fluorocarbon, Thin film
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::4f23ba34056fdc4c2353874a70648ac5Test
https://doi.org/10.1063/1.117672Test -
4
المؤلفون: K. R. Milkove, Alexander Zaslavsky, Young H. Lee, B. Ferland, T. O. Sedgwick
المصدر: Applied Physics Letters. 67:3921-3923
مصطلحات موضوعية: chemistry.chemical_compound, Quantization (physics), Materials science, Physics and Astronomy (miscellaneous), chemistry, Condensed matter physics, Stress relaxation, Heterojunction, Spectroscopy, Quantum well, Quantum tunnelling, Silicon-germanium, Strain energy
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::50d9ce74bfdaa08493591ed2ab26748dTest
https://doi.org/10.1063/1.115318Test -
5
المؤلفون: Young H. Lee, Mao‐Min Chen
المصدر: Journal of Applied Physics. 54:5966-5973
مصطلحات موضوعية: education.field_of_study, Plasma etching, Silicon, Chemistry, fungi, Population, technology, industry, and agriculture, Analytical chemistry, General Physics and Astronomy, chemistry.chemical_element, macromolecular substances, Isotropic etching, stomatognathic system, Etching (microfabrication), Sputtering, Dry etching, Reactive-ion etching, education
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::2cd144600ab207b759ba63a8e12d48dfTest
https://doi.org/10.1063/1.331774Test -
6
المؤلفون: S. N. Chakravarti, Gottlieb S. Oehrlein, Young H. Lee, C. M. Ransom
المصدر: Applied Physics Letters. 46:686-688
مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), chemistry, Silicon, Scattering, Etching (microfabrication), Fluorine, Analytical chemistry, chemistry.chemical_element, Reactive-ion etching, Oxygen, Layer (electronics), Ion
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::45b96efbfa6cfc3b15affed1af2a63f3Test
https://doi.org/10.1063/1.95530Test -
7
المؤلفون: R. M. Tromp, E. J. Petrillo, Young H. Lee, Gottlieb S. Oehrlein
المصدر: Applied Physics Letters. 45:420-422
مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Hydrogen, Silicon, Inorganic chemistry, technology, industry, and agriculture, Analytical chemistry, chemistry.chemical_element, chemistry, X-ray photoelectron spectroscopy, Etching (microfabrication), Ellipsometry, Reactive-ion etching, Layer (electronics), Deposition (law)
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::228209c68da16c7e82b417ddd11b1772Test
https://doi.org/10.1063/1.95243Test -
8
المؤلفون: Young H. Lee, A. A. Bright, Mao‐Min Chen
المصدر: Applied Physics Letters. 46:260-262
مصطلحات موضوعية: Materials science, Plasma etching, Physics and Astronomy (miscellaneous), Silicon, fungi, Doping, technology, industry, and agriculture, Analytical chemistry, chemistry.chemical_element, macromolecular substances, engineering.material, Space charge, Polycrystalline silicon, stomatognathic system, chemistry, Depletion region, Etching (microfabrication), engineering, Reactive-ion etching
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::c3da1e342c83fd72bfbf1898383f5223Test
https://doi.org/10.1063/1.95918Test -
9
المؤلفون: Kyungsun Park, Young H. Lee
المصدر: Review of Scientific Instruments. 53:915-916
مصطلحات موضوعية: Analog signal, Interfacing, business.industry, Computer science, Microcomputer, Plotter, business, Instrumentation, Computer hardware, Display device
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::5bb594ecd1b51f2c56534289eb23f517Test
https://doi.org/10.1063/1.1137082Test