التفاصيل البيبلوغرافية
| العنوان: |
图形化薄膜等效弹性模量的声表面波表征研究. (Chinese) |
| العنوان البديل: |
Surface Acoustic Wave Characterization of Equivalent Young’s Moduli for Patterned Films. (English) |
| المؤلفون: |
陈 龙, 肖 夏, 张 立, 戚海洋 |
| المصدر: |
Applied Mathematics & Mechanics (1000-0887); Apr2023, Vol. 44 Issue 4, p381-393, 13p |
| مصطلحات موضوعية: |
ACOUSTIC surface waves, YOUNG'S modulus, GREEN'S functions, FINITE element method, ACOUSTIC models, ELASTIC constants, ACOUSTIC wave propagation |
| الملخص (بالإنجليزية): |
Based on the equivalent elasticity theory for layered materials, the micro-mechanics equivalent models for single and dual damascene structures were established. The equivalent elastic constant of the patterned structure was introduced, to establish the propagation model for the surface acoustic waves propagating in the layered structure of the patterned film/substrate, and the theoretical dispersion curves of the surface acoustic waves were calculated with Green’s function and the matrix method. The finite element method was used to calculate 24 numerical examples of damascene structures with different volume ratios, and the results were compared with those of the strain energy method. The results show that, the average relative errors of the equivalent Young’s moduli of the 300 nm-thick dual damascene film and the 100 nm-thick single damascene film are 2.06% and 2.27%, respectively. The research verifies the correctness of the equivalent patterned structure model and the feasibility of the surface acoustic wave method to characterize the mechanical properties of patterned films, and provides a reference for the development of suitable chemico-mechanical polishing technologies for patterned films under low pressure. [ABSTRACT FROM AUTHOR] |
| Abstract (Chinese): |
基于分层材料等效弹性性质理论，建立了单大马士革和双大马士革结构的细观力学等效模型.通过引入图形化结构等效弹性常数，建立了声表面波在图形化薄膜/衬底分层结构中的传播模型，利用Green函数和矩阵法计算得到了表面波理论色散曲线.采用有限元法计算了24种不同体积比的大马士革结构数值算例，并与能量法计算结果进行了对比验证.结果表明，厚度为300 nm的双大马士革薄膜和厚度为100 nm的单大马士革薄膜等效弹性模量平均相对误差分别为2.06%和2.27%.验证了等效图形化结构模型的正确性以及声表面波方法表征图形化薄膜机械特性的可行性，研究结果可为开发适用于图形化薄膜、低压力的化学机械抛光工艺提供参考. [ABSTRACT FROM AUTHOR] |
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| قاعدة البيانات: |
Complementary Index |
