Precision and accuracy in film stiffness measurement by Brillouin spectroscopy
| العنوان: | Precision and accuracy in film stiffness measurement by Brillouin spectroscopy |
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| المؤلفون: | Marco Beghi, F. Di Fonzo, C. Ubaldi, Carlo Enrico Bottani, Silvia Maria Pietralunga |
| المصدر: | Review of Scientific Instruments. 82:053107 |
| بيانات النشر: | AIP Publishing, 2011. |
| سنة النشر: | 2011 |
| مصطلحات موضوعية: | Accuracy and precision, Brillouin Spectroscopy, Materials science, business.industry, Stiffness, Characterization (materials science), Optics, Ellipsometry, costanti elastiche, Calibration, medicine, spettrometria Brillouin, medicine.symptom, Thin film, business, Instrumentation, Elastic modulus |
| الوصف: | The interest in the measurement of the elastic properties of thin films is witnessed by a number of new techniques being proposed. However, the precision of results is seldom assessed in detail. Brillouin spectroscopy (BS) is an established optical, contactless, non-destructive technique, which provides a full elastic characterization of bulk materials and thin films. In the present work, the whole process of measurement of the elastic moduli by BS is critically analyzed: experimental setup, data recording, calibration, and calculation of the elastic moduli. It is shown that combining BS with ellipsometry a fully optical characterization can be obtained. The key factors affecting uncertainty of the results are identified and discussed. A procedure is proposed to discriminate factors affecting the precision from those affecting the accuracy. By the characterization of a model transparent material, silica in bulk and film form, it is demonstrated that both precision and accuracy of the elastic moduli measured by BS can reach 1% range, qualifying BS as a reference technique. |
| تدمد: | 1089-7623 0034-6748 |
| الوصول الحر: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::73137c3a999520dc26eca0f8aa6513e8Test https://doi.org/10.1063/1.3585980Test |
| حقوق: | OPEN |
| رقم الانضمام: | edsair.doi.dedup.....73137c3a999520dc26eca0f8aa6513e8 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 10897623 00346748 |
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