مؤتمر
Research on MEMS biaxial electromagnetic micromirror based on radial magnetic field distribution.
| العنوان: | Research on MEMS biaxial electromagnetic micromirror based on radial magnetic field distribution. |
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| المؤلفون: | Peng, Changsi, Cen, Fengjie, Li, Chen, Xu, Shihao, Zhao, Libo, Cheng, Guanghua |
| المصدر: | Proceedings of SPIE; 5/8/2021, Vol. 11885, p1188510-1188510, 1p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2602278 |