التفاصيل البيبلوغرافية
| العنوان: |
Effects of the electric field at the edge of a substrate to deposit a Ă100 mm uniform diamond film in a 2.45 GHz MPCVD system. |
| المؤلفون: |
AN, Kang, 安, ĺş·, ZHANG, Shuai, ĺĽ, ĺ¸..., SHAO, Siwu, 邵, 思ć-¦, LIU, Jinlong, ĺ, é‡'éľ™, WEI, Junjun, é-Ź, 俊俊, CHEN, Liangxian, é™, 良贤, ZHENG, Yuting, é', 宇äş-, LIU, Qing, ĺ, éť', LI, Chengming, 李, ććŽ |
| المصدر: |
Plasma Science & Technology; Apr2022, Vol. 24 Issue 4, p1-8, 8p |
| قاعدة البيانات: |
Complementary Index |
