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1دورية أكاديمية
المؤلفون: Ramiączek-Krasowska Maria, Prażmowska Joanna, Los Kornelia, Stafiniak Andrzej, Szyszka Adam, Paszkiewicz Regina, Orski Wojciech, Tarnowski Karol, Tłaczała Marek
المصدر: Open Physics, Vol 9, Iss 2, Pp 404-409 (2011)
مصطلحات موضوعية: nanoscratching, afm lithography, Physics, QC1-999
وصف الملف: electronic resource
العلاقة: https://doaj.org/toc/2391-5471Test
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2
المؤلفون: Adam Szyszka, Regina Paszkiewicz, Marek Tłaczała, Wojciech Orski, Maria Ramiączek-Krasowska, Kornelia Los, Andrzej Stafiniak, Karol Tarnowski, Joanna Prazmowska
المصدر: Open Physics, Vol 9, Iss 2, Pp 404-409 (2011)
مصطلحات موضوعية: Materials science, Computational lithography, business.industry, Extreme ultraviolet lithography, Physics, QC1-999, Resolution (electron density), General Physics and Astronomy, law.invention, Optics, law, nanoscratching, Optoelectronics, Microelectronics, X-ray lithography, afm lithography, Photolithography, business, Lithography, Next-generation lithography
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a4b523509f2b4c1eb267791d2d3ae062Test
https://doaj.org/article/dbefc88bc9d64abc980ffa8f08b6d3baTest