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1دورية أكاديمية
المؤلفون: Feng, Zhifu, Giubertoni, Damiano, Cian, Alessandro, Valt, Matteo, Barozzi, Mario, Gaiardo, Andrea, Guidi, Vincenzo
المصدر: Micromachines; Nov2023, Vol. 14 Issue 11, p2060, 15p
مصطلحات موضوعية: GAS detectors, METAL fabrication, TEMPERATURE coefficient of electric resistance, SECONDARY ion mass spectrometry, ELECTRON beam lithography, FOCUSED ion beams, ELECTRON beams
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2دورية أكاديمية
المؤلفون: Mazloumi, Mahyar, Sabat, Ribal Georges
المصدر: Micromachines; Nov2023, Vol. 14 Issue 11, p1981, 11p
مصطلحات موضوعية: ELECTRON beam lithography, BESSEL beams, DIGITAL cameras, DIFFRACTIVE optical elements, LITHOGRAPHY, PLASMONICS
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3دورية أكاديمية
المؤلفون: Feng, Zhifu, Giubertoni, Damiano, Cian, Alessandro, Valt, Matteo, Ardit, Matteo, Pedrielli, Andrea, Vanzetti, Lia, Fabbri, Barbara, Guidi, Vincenzo, Gaiardo, Andrea
المصدر: Micromachines; Oct2023, Vol. 14 Issue 10, p1908, 16p
مصطلحات موضوعية: ELECTRON beam lithography, GAS detectors, ELECTRON beams, ZINC oxide, METALLIC oxides, HAZARDOUS substances, ZINC oxide films
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4
المؤلفون: Ohlin, Hanna, Frisk, Thomas, Vogt, Ulrich
المصدر: Micromachines. 14(4)
مصطلحات موضوعية: lift-off, single layer, electron beam lithography, CSAR62, X-ray diffractive optics, zone plate, nanostructures, nanofabrication
وصف الملف: print
الوصول الحر: https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-326871Test
https://doi.org/10.3390/mi14040766Test -
5دورية أكاديمية
المؤلفون: Zhifu Feng, Damiano Giubertoni, Alessandro Cian, Matteo Valt, Mario Barozzi, Andrea Gaiardo, Vincenzo Guidi
المصدر: Micromachines, Vol 14, Iss 11, p 2060 (2023)
مصطلحات موضوعية: gas sensors, nano heaters, electron beam lithography, focused ion beam, ion beam lithography, power consumption, Mechanical engineering and machinery, TJ1-1570
وصف الملف: electronic resource
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6دورية أكاديمية
المؤلفون: Zhang, Xiu, Li, Shuqi, Wang, Baoxing, Chen, Baojin, Guo, Haojie, Yue, Rui, Cai, Yong
المصدر: Micromachines; Mar2023, Vol. 14 Issue 3, p534, 8p
مصطلحات موضوعية: PHOTORESISTS, SURFACE passivation, SURFACES (Technology), ELECTRON beam lithography, PLASMA etching, QUANTUM efficiency, LIGHT emitting diodes, LED displays
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7دورية أكاديمية
المؤلفون: Zhifu Feng, Damiano Giubertoni, Alessandro Cian, Matteo Valt, Matteo Ardit, Andrea Pedrielli, Lia Vanzetti, Barbara Fabbri, Vincenzo Guidi, Andrea Gaiardo
المصدر: Micromachines, Vol 14, Iss 10, p 1908 (2023)
مصطلحات موضوعية: gas sensor, ZnO, MEMS, electron beam lithography, low power consumption, nanofilm, Mechanical engineering and machinery, TJ1-1570
وصف الملف: electronic resource
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8دورية أكاديمية
المؤلفون: Zhang, Yaxin, Wang, Chenying, Jing, Weixuan, Wang, Song, Zhang, Yujing, Zhang, Liangliang, Zhang, Yijun, Zhu, Nan, Wang, Yunxiang, Zhao, Yifan, Lin, Qijing, Jiang, Zhuangde
المصدر: Micromachines; Jul2022, Vol. 13 Issue 7, pN.PAG-N.PAG, 10p
مصطلحات موضوعية: OPTOELECTRONIC devices, ELECTRON beam lithography, ATOMIC layer deposition, ATOMIC force microscopes, CENTER of mass, UNITS of measurement
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9دورية أكاديميةStudy of the Pattern Preparation and Performance of the Resistance Grid of Thin-Film Strain Sensors.
المؤلفون: Cheng, Yunping, Wu, Wenge, Zhao, Yongjuan, Han, Yanwen, Song, Ding
المصدر: Micromachines; Jun2022, Vol. 13 Issue 6, p892-N.PAG, 17p
مصطلحات موضوعية: STRAIN sensors, ELECTRON beam lithography, ATOMIC force microscopes, MAGNETRONS, SCANNING electron microscopes, ION beams, MAGNETRON sputtering
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10دورية أكاديمية
المؤلفون: Hanna Ohlin, Thomas Frisk, Ulrich Vogt
المصدر: Micromachines, Vol 14, Iss 4, p 766 (2023)
مصطلحات موضوعية: lift-off, single layer, electron beam lithography, CSAR62, X-ray diffractive optics, zone plate, Mechanical engineering and machinery, TJ1-1570
وصف الملف: electronic resource