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المؤلفون: W.L.M. Weerts, G.B.M.M. Marin, de M.H.J.M. Croon
المساهمون: Chemical Reactor Engineering
المصدر: Journal of the Electrochemical Society, 145(4), 1318-1330. Electrochemical Society, Inc.
مصطلحات موضوعية: Silanes, Silicon, Renewable Energy, Sustainability and the Environment, Inorganic chemistry, Analytical chemistry, chemistry.chemical_element, Chemical vapor deposition, engineering.material, Condensed Matter Physics, Silane, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Polycrystalline silicon, chemistry, Plasma-enhanced chemical vapor deposition, Materials Chemistry, Electrochemistry, engineering, Deposition (phase transition), Disilane
وصف الملف: application/pdf
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::eeb42f02fc3ab22f8576ac999b3023c2Test
https://doi.org/10.1149/1.1838458Test -
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المؤلفون: M.H.J.M. de Croon, Guy B. Marin, W.L.M. Weerts
المساهمون: Chemical Reactor Engineering
المصدر: Journal of the Electrochemical Society, 144(9), 3213-3221. Electrochemical Society, Inc.
مصطلحات موضوعية: Silicon, Renewable Energy, Sustainability and the Environment, chemistry.chemical_element, Mineralogy, Rate equation, Chemical vapor deposition, engineering.material, Condensed Matter Physics, Thiele modulus, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Polycrystalline silicon, chemistry, Materials Chemistry, Electrochemistry, engineering, Deposition (phase transition), Wafer, Disilane, Composite material
وصف الملف: application/pdf
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0ad5acb2ea8acd609c7f6a6c716e3a3aTest
https://doi.org/10.1149/1.1837986Test