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1
المؤلفون: Kai-Chih Liang, Ming-Han Tsai, Weileun Fang, Yu-Chia Liu
المصدر: Journal of Microelectromechanical Systems. 24:1916-1927
مصطلحات موضوعية: Microelectromechanical systems, Materials science, business.industry, Mechanical Engineering, Electrical engineering, Oxide, Curvature, Noise floor, Thermal expansion, Radius of curvature (optics), chemistry.chemical_compound, Parasitic capacitance, chemistry, Optoelectronics, Electrical and Electronic Engineering, Proof mass, business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::ce370c03aee8e5b0cc5a6fe88538a708Test
https://doi.org/10.1109/jmems.2015.2452270Test -
2
المؤلفون: Yu-Chia Liu, Wen-Chien Chen, Ming-Huang Li, Ming-Han Tsai, Sheng-Shian Li, Weileun Fang
المصدر: Journal of Microelectromechanical Systems. 22:1054-1065
مصطلحات موضوعية: Materials science, business.industry, Mechanical Engineering, Capacitive sensing, Electrical engineering, Stopband, Isotropic etching, Resonator, CMOS, Etching (microfabrication), Electrode, Optoelectronics, Electrical and Electronic Engineering, Center frequency, business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::be8caca9473399f2651a4930bc244b17Test
https://doi.org/10.1109/jmems.2013.2263091Test -
3
المؤلفون: Ming-Han Tsai, Weileun Fang, Yu-Chia Liu
المصدر: Journal of Microelectromechanical Systems. 21:1329-1337
مصطلحات موضوعية: Microelectromechanical systems, Materials science, business.industry, Semiconductor device fabrication, Mechanical Engineering, Capacitive sensing, Electrical engineering, Accelerometer, Noise (electronics), CMOS, Electrode, Optoelectronics, Electrical and Electronic Engineering, Proof mass, business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::fef759ebc14aabf3cb47053b5aed1f78Test
https://doi.org/10.1109/jmems.2012.2205904Test -
4
المؤلفون: Li-Yuan Lin, Yu-Chia Liu, Ming-Han Tsai, Weileun Fang, Chih-Ming Sun
المصدر: Journal of Microelectromechanical Systems. 20:119-127
مصطلحات موضوعية: chemistry.chemical_classification, Materials science, Polydimethylsiloxane, business.industry, Mechanical Engineering, Capacitive sensing, Polymer, Dielectric, chemistry.chemical_compound, chemistry, CMOS, Electronic engineering, Optoelectronics, Sensitivity (control systems), Electrical and Electronic Engineering, business, Tactile sensor, Electronic circuit
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::1b30c1f17a943806031fe01d126d927dTest
https://doi.org/10.1109/jmems.2010.2090494Test -
5دورية أكاديمية
المؤلفون: Tsai, Ming-Han1, Liu, Yu-Chia2, Liang, Kai-Chih3, Fang, Weileun2
المصدر: Journal of Microelectromechanical Systems. Dec2015, Vol. 24 Issue 6, p1916-1927. 12p.
مصطلحات موضوعية: *ACCELEROMETERS, *MICROELECTROMECHANICAL systems, *THERMAL stability, *COMPLEMENTARY metal oxide semiconductors, *ELECTRODES, *THERMAL expansion, *DETECTORS
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6دورية أكاديمية
المؤلفون: Liu, Yu-Chia1, Tsai, Ming-Han1, Chen, Wen-Chien2, Li, Ming-Huang1, Li, Sheng-Shian1, Fang, Weileun1
المصدر: Journal of Microelectromechanical Systems. Oct2013, Vol. 22 Issue 5, p1054-1065. 12p.
مصطلحات موضوعية: *COMPLEMENTARY metal oxide semiconductors, *MICROELECTROMECHANICAL systems, *ELECTRIC resonators, *TEMPERATURE effect, *ELECTRIC circuits, *THERMAL stability