المؤلفون: Rais-zadeh, Mina¹ minaii@ece.gatech.edu, Kohl, Paul A.² Paul.Kohl@chbe.gatech.edu, Ayazi, Farrokh¹ ayazi@ece.gatech.edu

المصدر: Journal of Microelectromechanical Systems. Feb2008, Vol. 17 Issue 1, p78-84. 7p. 18 Graphs.

مصطلحات موضوعية: *ELECTRIC inductors, *MICROELECTROMECHANICAL systems, *ELECTRIC switchgear, *SILVER, *ELECTRIC inductance, *SILICON

المؤلفون: Gray Jr., Gary D.¹, Kohl, Paul A.¹

المصدر: Journal of Microelectromechanical Systems. Aug2006, Vol. 15 Issue 4, p904-911. 8p. 4 Black and White Photographs, 1 Chart, 6 Graphs.

مصطلحات موضوعية: *MICROELECTROMECHANICAL systems, *MICROMACHINING, *MICROACTUATORS, *MECHATRONICS, *MICROELECTRONICS, *SWITCHING circuits

المؤلفون: Gray, Gary D., Morgan, Matthew J., Kohl, Paul A.

المصدر: Journal of Microelectromechanical Systems; Feb2004, Vol. 13 Issue 1, p51-62, 12p, 13 Diagrams, 1 Chart

مصطلحات موضوعية: ELECTROSTATICS, MICROACTUATORS, MICROELECTROMECHANICAL systems, ELECTRODES, ELECTROPLATING, ENGINEERING instruments, NANOTECHNOLOGY, MECHANICAL engineering

المؤلفون: Jayachandran, Joseph Paul, Reed, Hollie A., Zhen, Hongshi, Rhodes, Larry F., Henderson, Clifford L., Allen, Sue Ann Bidstrup, Kohl, Paul A.

المصدر: Journal of Microelectromechanical Systems; Apr2003, Vol. 12 Issue 2, p147, 13p, 11 Black and White Photographs, 7 Diagrams, 1 Chart, 7 Graphs

مصطلحات موضوعية: MICROELECTROMECHANICAL systems, POLYCARBONATES

المؤلفون: Bhusari, Dhananjay, Reed, Hollie A., Wedlake, Michael, Padovani, Agnes M., Allen, Sue Ann Bidstrup, Kohl, Paul A.

المصدر: Journal of Microelectromechanical Systems; Sep2001, Vol. 10 Issue 3, p400, 9p, 18 Black and White Photographs, 2 Diagrams, 3 Graphs

مصطلحات موضوعية: MICROELECTROMECHANICAL systems, MICROELECTRONICS equipment, EQUIPMENT & supplies