التفاصيل البيبلوغرافية
| العنوان: |
A Hybrid MEMS-Fiber Optic Tunable Fabry-Perot Filter. |
| المؤلفون: |
Hays, David, Zribi, Anis, Chandrasekaran, Shankar, Goravar, Shivappa, Maity, Sandip, Douglas, Leonard R., Hsu, Kevin, Banerjee, Ayan |
| المصدر: |
Journal of Microelectromechanical Systems; Apr2010, Vol. 19 Issue 2, p419-429, 11p, 1 Chart, 15 Graphs |
| مصطلحات موضوعية: |
MICROELECTROMECHANICAL systems, SILICON, BANDWIDTHS, OPTICAL fibers, DIELECTRIC devices, ACTUATORS |
| مستخلص: |
This paper describes a bulk-micromachined electrostatically tunable Fabry-Perot interferometric filter. The device is a hybrid optical filter combining fiber optics and microelectromechanical systems (MEMS) technologies. The static mirror is a Bragg grating mirror built on the end face of an optical fiber that is integrated with a MEMS device, which includes the tunable gold-coated mirror. The MEMS device is fabricated in <100>-oriented silicon wafers using modified and optimized batchMEMS processes. A two-stage approach was used to achieve high finesse (F) and broad tunability simultaneously. In the first stage, actuator issues and mirror structural defects were corrected for by optimizing the fabrication-process parameters. In this stage, near-theoretical performance has been achieved with a pure Si MEMS tunable etalon. In stage two, optical fibers with dielectric stack mirrors from Micron Optics, Inc. have been integrated with the MEMS devices to form tunable cavities. The device insertion loss was below 15 dB and was mostly attributed to absorption losses in the gold coating. We measured a pass bandwidth of around 0.54 nm and a tuning range of nearly 120 nm resulting in an F of over 220. [ABSTRACT FROM AUTHOR] |
|
Copyright of Journal of Microelectromechanical Systems is the property of IEEE and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) |
| قاعدة البيانات: |
Complementary Index |
