REAL-TIME MOTION CONTROL WITH SUBNANOMETER HETERODYNE INTERFEROMETRY
| العنوان: | REAL-TIME MOTION CONTROL WITH SUBNANOMETER HETERODYNE INTERFEROMETRY |
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| المؤلفون: | Sheau-shi Pan, Hsien-Chi Yeh, Wei-Tou Ni |
| المصدر: | International Journal of Modern Physics D. 11:1087-1099 |
| بيانات النشر: | World Scientific Pub Co Pte Lt, 2002. |
| سنة النشر: | 2002 |
| مصطلحات موضوعية: | Heterodyne, Physics, business.industry, Picometre, Astronomy and Astrophysics, Laser, Motion control, law.invention, Metrology, Nonlinear system, Optics, Space and Planetary Science, Modulation, law, Linear motion, business, Mathematical Physics |
| الوصف: | The precision requirement of ASTROD laser astrodynamical missions and research in the new definition of the kilogram drove us to engage in the development, research and application of sub-nanometer and picometer laser metrology and real-time motion control. We realized mid-point cyclic modulation in real time to suppress the periodic nonlinear errors of heterodyne interferometery, and employed a closed-loop feedback control to compensate PZT nonlinearity and other deviations. Using flexure stags and PZTs, we built up a three-axis (X, Y, θz) nanopositioning system with real-time subnanometer heterodyne interferometry. The experimental results of 12-μm linear motion show that the X-axis positioning error can reach 0.6 nm rms, the Y-axis positioning error can reach 0.06 nm rms, and the θz-axis positioning error is about 4 × 10-9 rad rms. We also used two-stage and three-stage schemes to extend the travel range. A preliminary run using the two-stage scheme can attain a 5 mm travel range with a nonlinearity of 10 nm rms. |
| تدمد: | 1793-6594 0218-2718 |
| الوصول الحر: | https://explore.openaire.eu/search/publication?articleId=doi_________::7ea0aa6a3f7aacfa036857f166a57fadTest https://doi.org/10.1142/s0218271802002591Test |
| رقم الانضمام: | edsair.doi...........7ea0aa6a3f7aacfa036857f166a57fad |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 17936594 02182718 |
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