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المؤلفون: Luo Qian, Bin Liu, Qi Yu, Yang Liu, Kaizhou Tan, Xiangzhan Wang, Gan Cheng, Qingping Zeng, Xianwei Ying
المصدر: IEEE Transactions on Electron Devices. 61:207-211
مصطلحات موضوعية: Materials science, Silicon, business.industry, chemistry.chemical_element, Electronic, Optical and Magnetic Materials, Stress (mechanics), chemistry, Etching (microfabrication), Logic gate, MOSFET, Ultimate tensile strength, Electronic engineering, Optoelectronics, Electrical and Electronic Engineering, business, Layer (electronics), Stress concentration
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::a9e2c7ab7e67e22bcf9f195b62ebd882Test
https://doi.org/10.1109/ted.2013.2292545Test -
2دورية أكاديمية
المؤلفون: Wang, Xiangzhan, Zeng, Qingping, Liu, Bin, Gan, Cheng, Luo, Qian, Yu, Qi, Liu, Yang, Tan, Kaizhou, Ying, Xianwei
المصدر: IEEE Transactions on Electron Devices; Jan2014, Vol. 61 Issue 1, p207-211, 5p
مصطلحات موضوعية: METAL oxide semiconductor field-effect transistors, STRESS concentration, LOGIC circuits, NANOELECTROMECHANICAL systems, COMPLEMENTARY metal oxide semiconductors, ELECTRIC properties of silicon