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1
المؤلفون: F. J. (Fieke) van den Bruele, Fred Roozeboom, P. Poodt, Ylm Yves Creyghton, Wmm Erwin Kessels
المساهمون: Plasma & Materials Processing, Atomic scale processing, Processing of low-dimensional nanomaterials
المصدر: ECS Transactions, 7, 69, 243-258
Atomic Layer Deposition Applications 11, 69(7), 243-258مصطلحات موضوعية: Microelectromechanical systems, TS - Technical Sciences, Industrial Innovation, Materials science, Plasma etching, Passivation, Silicon, business.industry, Atomic layer deposition, chemistry.chemical_element, Nanotechnology, Die (integrated circuit), Oxide passivation, chemistry, TFT - Thin Film Technology, Etching (microfabrication), Nano Technology, Optoelectronics, Atmospheric pressure, Wafer dicing, business, Materials
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d67deb723e2960d449c71a27f0ffed07Test
https://doi.org/10.1149/06907.0243ecstTest -
2
المؤلفون: Robert M. Wallace, Rafik Addou
المصدر: ECS Transactions. 79:11-20
مصطلحات موضوعية: symbols.namesake, Materials science, Passivation, symbols, Nanotechnology, van der Waals force
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::b67571ce31ba4c7ef02a2c3900388d00Test
https://doi.org/10.1149/07901.0011ecstTest -
3
المؤلفون: Hiroki Ikegaya, Tomonori Nishimura, Akira Toriumi, Chi Liu
المصدر: ECS Transactions. 75:227-235
مصطلحات موضوعية: Passivation, business.industry, Chemistry, Optoelectronics, Nanotechnology, business, Leakage (electronics)
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6a847f04becd355ab40fa7e4a0b02d83Test
https://doi.org/10.1149/07504.0227ecstTest -
4
المؤلفون: Chieh-Chun Chiang, Srini Raghavan
المصدر: ECS Transactions. 69:3-14
مصطلحات موضوعية: Materials science, Passivation, law, Etching (microfabrication), Nanotechnology, Integrated circuit, Electrochemistry, law.invention
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::28633b0ed113345153183c826cff4002Test
https://doi.org/10.1149/06908.0003ecstTest -
5
المصدر: ECS Transactions. 69:61-65
مصطلحات موضوعية: Materials science, Passivation, business.industry, Diamond, Nanotechnology, High voltage, Chemical vapor deposition, Dielectric, engineering.material, MOSFET, engineering, Optoelectronics, business, Material properties, High-κ dielectric
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b7b57dad2f23b2d32e6cb06877be8c8eTest
https://doi.org/10.1149/06905.0061ecstTest -
6
المؤلفون: Uthayasankaran Peralagu, Ian M. Povey, Yen-Chun Fu, Paul K. Hurley, David Millar, Iain G. Thayne, Olesya Ignatova, Khalid Hossain, Xu Li, Matthew J. Steer, Terry G Golding, Manish Jain, Ravi Droopad
المصدر: ECS Transactions. 69:15-36
مصطلحات موضوعية: Engineering, Anisotropic etching, Fabrication, Fin, Passivation, business.industry, TK, Optoelectronics, High resolution, Nanotechnology, Dry etching, business, Two stages
وصف الملف: application/pdf
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b4dc496745198c39ea3f93c9455232a3Test
https://doi.org/10.1149/06905.0015ecstTest -
7
المؤلفون: Ted H. Yu, Christian Ratsch
المصدر: ECS Transactions. 66:63-70
مصطلحات موضوعية: Materials science, Passivation, Ridge (meteorology), Nanotechnology, Engineering physics, Nanopillar
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::da8503177c3cfa8944bddc3026e25d15Test
https://doi.org/10.1149/06607.0063ecstTest -
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المؤلفون: Jingxin Jiang, Gengo Tatsuoka, Dapeng Wang, Mamoru Furuta
المصدر: ECS Transactions. 64:53-58
مصطلحات موضوعية: Materials science, Passivation, business.industry, Doping, Oxide, Field effect, chemistry.chemical_element, Nanotechnology, Selective deposition, chemistry.chemical_compound, chemistry, Silicon nitride, Thin-film transistor, Fluorine, Optoelectronics, business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::1f943699485b2553ff4a7fa032c6ec41Test
https://doi.org/10.1149/06410.0053ecstTest -
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المؤلفون: Toda Tatsuya, Gengo Tatsuoka, Mamoru Furuta, Dapeng Wang, Jingxin Jiang
المصدر: ECS Transactions. 64:59-64
مصطلحات موضوعية: chemistry.chemical_compound, Materials science, Silicon nitride, chemistry, Passivation, Thin-film transistor, Nanotechnology
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::251062af705cc23d5f26a0aaf39d1827Test
https://doi.org/10.1149/06410.0059ecstTest -
10
المصدر: ECS Transactions. 45:123-136
مصطلحات موضوعية: Materials science, Passivation, Precipitation (chemistry), fungi, Nanotechnology, Cathode, Anode, law.invention, Ion, Chemical engineering, law, Electrode, Current (fluid), Short circuit
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::14260e2fae1656e52cf93768caf14836Test
https://doi.org/10.1149/04529.0123ecstTest