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المصدر: ECS Transactions. 69:61-65
مصطلحات موضوعية: Materials science, Passivation, business.industry, Diamond, Nanotechnology, High voltage, Chemical vapor deposition, Dielectric, engineering.material, MOSFET, engineering, Optoelectronics, business, Material properties, High-κ dielectric
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b7b57dad2f23b2d32e6cb06877be8c8eTest
https://doi.org/10.1149/06905.0061ecstTest -
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المؤلفون: Uthayasankaran Peralagu, Ian M. Povey, Yen-Chun Fu, Paul K. Hurley, David Millar, Iain G. Thayne, Olesya Ignatova, Khalid Hossain, Xu Li, Matthew J. Steer, Terry G Golding, Manish Jain, Ravi Droopad
المصدر: ECS Transactions. 69:15-36
مصطلحات موضوعية: Engineering, Anisotropic etching, Fabrication, Fin, Passivation, business.industry, TK, Optoelectronics, High resolution, Nanotechnology, Dry etching, business, Two stages
وصف الملف: application/pdf
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b4dc496745198c39ea3f93c9455232a3Test
https://doi.org/10.1149/06905.0015ecstTest