-
1
المؤلفون: F. J. (Fieke) van den Bruele, Fred Roozeboom, P. Poodt, Ylm Yves Creyghton, Wmm Erwin Kessels
المساهمون: Plasma & Materials Processing, Atomic scale processing, Processing of low-dimensional nanomaterials
المصدر: ECS Transactions, 7, 69, 243-258
Atomic Layer Deposition Applications 11, 69(7), 243-258مصطلحات موضوعية: Microelectromechanical systems, TS - Technical Sciences, Industrial Innovation, Materials science, Plasma etching, Passivation, Silicon, business.industry, Atomic layer deposition, chemistry.chemical_element, Nanotechnology, Die (integrated circuit), Oxide passivation, chemistry, TFT - Thin Film Technology, Etching (microfabrication), Nano Technology, Optoelectronics, Atmospheric pressure, Wafer dicing, business, Materials
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d67deb723e2960d449c71a27f0ffed07Test
https://doi.org/10.1149/06907.0243ecstTest -
2
المؤلفون: Jingxin Jiang, Gengo Tatsuoka, Dapeng Wang, Mamoru Furuta
المصدر: ECS Transactions. 64:53-58
مصطلحات موضوعية: Materials science, Passivation, business.industry, Doping, Oxide, Field effect, chemistry.chemical_element, Nanotechnology, Selective deposition, chemistry.chemical_compound, chemistry, Silicon nitride, Thin-film transistor, Fluorine, Optoelectronics, business
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::1f943699485b2553ff4a7fa032c6ec41Test
https://doi.org/10.1149/06410.0053ecstTest -
3
المؤلفون: Thierry Billon, Laurent Clavelier, Olivier Faynot, M. Piccin, Jéro^me Dechamp, Thomas Signamarcheix, Fabrice Lallement, Arnaud Rigny, Jean-Francois Damlencourt, Chrystel Deguet, Sorin Cristoloveanu, Marie-Anne Jaud, Alexandra Abbadie, Konstantin Bourdelle, Michel Pellat, K. Romanjek, Loic Sanchez, Cécile Maurois, A. Pouydebasque, Fabien Boulanger, Nicolas Daval, Perrine Batude, Cyrille Le Royer, Claude Tabone, Aurélie Tauzin, Eric Guiot, Charlotte Drazek, Frédéric Mazen, Emmanuel Augendre, P. Scheiblin, Bruno Ghyselen, Jean-Michel Hartmann, William Van Den Daele, Maud Vinet, Marc Zussy, Lamine Benaissa, Nicolas Blanc
المصدر: ECS Transactions. 25:351-362
مصطلحات موضوعية: Fabrication, Materials science, chemistry, Passivation, Tunneling field effect transistor, chemistry.chemical_element, Nanotechnology, Germanium, Insulator (electricity), Engineering physics
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::3185bda807608d17f62d2d6fb7791798Test
https://doi.org/10.1149/1.3203972Test