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1دورية أكاديمية
المؤلفون: Hirofumi Takikawa, Shuji Kiyohara, Tomoyuki Kashiwagi, Yoshinari Sugiyama, Yoshio Taguchi, Yuichi Kurashima
المصدر: e-Journal of Surface Science and Nanotechnology. 2009, 7:772
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المؤلفون: Tomoyuki Kashiwagi, Hirofumi Takikawa, Yuichi Kurashima, Shuji Kiyohara, Yoshinari Sugiyama, Yoshio Taguchi
المصدر: e-Journal of Surface Science and Nanotechnology. 7:772-776
مصطلحات موضوعية: Fabrication, Materials science, business.industry, Diamond, Bioengineering, Nanotechnology, Surfaces and Interfaces, engineering.material, Condensed Matter Physics, Electron cyclotron resonance, Surfaces, Coatings and Films, Ion, Nanolithography, Resist, Mechanics of Materials, engineering, Cathode ray, Optoelectronics, business, Lithography, Biotechnology
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::0f65d11b36b8242302fd6cce34d1bc35Test
https://doi.org/10.1380/ejssnt.2009.772Test