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1
المؤلفون: S. Week, C. Ossmann, Reinhard Voelkel, M. Eisner, S. Seider, E. Feick, P. Kaiser, Kenneth J. Weible
المصدر: Diffractive Optics and Micro-Optics.
مصطلحات موضوعية: Microlens, Depth of focus, Materials science, Fabrication, business.industry, law.invention, Lens (optics), Optics, law, Wafer, Photolithography, business, Projection (set theory), Lithography
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::6ee12e84e91226a087ca0d7b9c8d6ebaTest
https://doi.org/10.1364/domo.2000.dtud35Test -
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المؤلفون: M. Eisner, N. Lindlein, J. Schwider
المصدر: Diffractive Optics and Micro-Optics.
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::0cc6465d5da8e164f83fcf69149af123Test
https://doi.org/10.1364/domo.1998.dtud.19Test