دورية أكاديمية
PECVD of hydrogenated diamond-like carbon films from CH4–Ar mixtures: growth chemistry and material characteristics
| العنوان: | PECVD of hydrogenated diamond-like carbon films from CH4–Ar mixtures: growth chemistry and material characteristics |
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| المؤلفون: | Cicala, G |
| المصدر: | Diamond and Related Materials ; ISSN 0925-9635 |
| بيانات النشر: | Elsevier BV |
| سنة النشر: | 2003 |
| المجموعة: | ScienceDirect (Elsevier - Open Access Articles via Crossref) |
| مصطلحات موضوعية: | Electrical and Electronic Engineering, Materials Chemistry, Mechanical Engineering, General Chemistry, Electronic, Optical and Magnetic Materials |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1016/s0925-9635(03)00448-5 |
| الإتاحة: | https://doi.org/10.1016/s0925-9635Test(03)00448-5 https://api.elsevier.com/content/article/PII:S0925-9635Test(03)00448-5?httpAccept=text/xml https://api.elsevier.com/content/article/PII:S0925-9635Test(03)00448-5?httpAccept=text/plain |
| حقوق: | https://www.elsevier.com/tdm/userlicense/1.0Test/ |
| رقم الانضمام: | edsbas.677363B8 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1016/s0925-9635(03)00448-5 |
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