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المؤلفون: Philippe Hurat, Denis L. Goinard, Michel L. Cote, Michael L. Rieger, Alexander Miloslavsky
المصدر: Design and Process Integration for Microelectronic Manufacturing III.
مصطلحات موضوعية: Engineering, Resolution enhancement technologies, business.industry, Yield (finance), Design flow, Design for manufacturability, Reliability engineering, Cost reduction, Design intent, Hardware_INTEGRATEDCIRCUITS, Node (circuits), business, Lithography, Simulation
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::c1b54a4ece789440da9064f51ab340e0Test
https://doi.org/10.1117/12.600086Test -
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المصدر: Design and Process Integration for Microelectronic Manufacturing III.
مصطلحات موضوعية: Engineering, Engineering drawing, Optical proximity correction, business.industry, Optical engineering, Metric (mathematics), Process (computing), Range (statistics), Point (geometry), Process window, business, Algorithm, Design for manufacturability
الوصول الحر: https://explore.openaire.eu/search/publication?articleId=doi_________::cfff8697fbad653104aacde332f1d0bcTest
https://doi.org/10.1117/12.600180Test