التفاصيل البيبلوغرافية
| العنوان: |
Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices |
| المؤلفون: |
Dhayal, Marshal marshaldhayal@yahoo.com, Jeong, Hyung Gon1, Choi, Jeong Sik1 |
| المصدر: |
Applied Surface Science. Dec2005, Vol. 252 Issue 5, p1710-1715. 6p. |
| مصطلحات موضوعية: |
*POLYMERIZATION, *CHEMICAL reactions, *ELECTRODES, *SURFACE chemistry |
| مستخلص: |
Abstract: Using a plasma polymerisation process with optical lithography, wet and dry etching techniques we have fabricated an organic micro-fluidic device (OMDF) on silicon/glass substrate. An asymmetric electrode array used in micro-fluidic device (MFD) with small electrode (4μm wide) separated from the large electrode (20μm wide) by 20μm and 6μm gaps in both sides respectively. In this study we have found that plasma polymerisation process is not only important for changing the surface chemical and physical properties but also has advantage in bonding of these micro devices at low temperature (∼100°C) due to low T g of polymeric material. The fluidic velocity measurement shows a maximum of about 450μm/s in a 150μm channel width of organic micro-fluidic devices after plasma surface modification. [Copyright &y& Elsevier] |
| قاعدة البيانات: |
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