دورية أكاديمية

Direct Printing of Ultrathin Block Copolymer Film with Nano‐in‐Micro Pattern Structures

التفاصيل البيبلوغرافية
العنوان: Direct Printing of Ultrathin Block Copolymer Film with Nano‐in‐Micro Pattern Structures
المؤلفون: Tae Wan Park, Young Lim Kang, Eun Bin Kang, Hyunsung Jung, Seoung‐Ki Lee, Geon‐Tae Hwang, Jung Woo Lee, Si‐Young Choi, Sahn Nahm, Se‐Hun Kwon, Kwang Ho kim, Woon Ik Park
المصدر: Advanced Science, Vol 10, Iss 29, Pp n/a-n/a (2023)
بيانات النشر: Wiley, 2023.
سنة النشر: 2023
المجموعة: LCC:Science
مصطلحات موضوعية: block copolymer, nanopatterning, nanotransfer printing, self‐assembly, wafer scale, Science
الوصف: Abstract Nanotransfer printing (nTP) is one of the most promising nanopatterning methods given that it can be used to produce nano‐to‐micro patterns effectively with functionalities for electronic device applications. However, the nTP process is hindered by several critical obstacles, such as sub‐20 nm mold technology, reliable large‐area replication, and uniform transfer‐printing of functional materials. Here, for the first time, a dual nanopatterning process is demonstrated that creates periodic sub‐20 nm structures on the eight‐inch wafer by the transfer‐printing of patterned ultra‐thin (
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2198-3844
العلاقة: https://doaj.org/toc/2198-3844Test
DOI: 10.1002/advs.202303412
الوصول الحر: https://doaj.org/article/9f37dffdca7f4386824aaf573a0cfb5aTest
رقم الانضمام: edsdoj.9f37dffdca7f4386824aaf573a0cfb5a
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:21983844
DOI:10.1002/advs.202303412