مؤتمر
Assessment of minority-alloy component segregation (e.g. Mn, Al) in back end of line copper trench structures using Kelvin probe technique
| العنوان: | Assessment of minority-alloy component segregation (e.g. Mn, Al) in back end of line copper trench structures using Kelvin probe technique |
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| المؤلفون: | Nag, Joyeeta, Kohli, Kriti, Simon, Andrew, Krishnan, Siddarth, Parks, Christopher, Ray, Shishir, Tijiwa-Birk, Felipe |
| المصدر: | 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) |
| بيانات النشر: | IEEE |
| سنة النشر: | 2014 |
| نوع الوثيقة: | conference object |
| اللغة: | unknown |
| DOI: | 10.1109/asmc.2014.6847017 |
| الإتاحة: | https://doi.org/10.1109/asmc.2014.6847017Test http://xplorestaging.ieee.org/ielx7/6843030/6846940/06847017.pdf?arnumber=6847017Test |
| رقم الانضمام: | edsbas.FCDBF9FA |
| قاعدة البيانات: | BASE |
| DOI: | 10.1109/asmc.2014.6847017 |
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