مؤتمر
Analysis of the effects of thermo-mechanical stress on the frequency shift of MEMS resonators
| العنوان: | Analysis of the effects of thermo-mechanical stress on the frequency shift of MEMS resonators |
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| المؤلفون: | Xiaorui, Bie, Xudong, Zou, Xingyin, Xiong, Zheng, Wang, Wuhao, Yang, Zhitian, Li |
| المصدر: | 2022 23rd International Conference on Electronic Packaging Technology (ICEPT) |
| بيانات النشر: | IEEE |
| سنة النشر: | 2022 |
| نوع الوثيقة: | conference object |
| اللغة: | unknown |
| DOI: | 10.1109/icept56209.2022.9873218 |
| الإتاحة: | https://doi.org/10.1109/icept56209.2022.9873218Test http://xplorestaging.ieee.org/ielx7/9872527/9872536/09873218.pdf?arnumber=9873218Test |
| حقوق: | https://doi.org/10.15223/policy-029Test ; https://doi.org/10.15223/policy-037Test |
| رقم الانضمام: | edsbas.52AEA0A2 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1109/icept56209.2022.9873218 |
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