مؤتمر
Scaling/LER study of Si GAA nanowire FET using 3D Finite Element Monte Carlo simulations.
| العنوان: | Scaling/LER study of Si GAA nanowire FET using 3D Finite Element Monte Carlo simulations. |
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| المؤلفون: | Elmessary, Muhammad A., Nagy, Daniel, Aldegunde, Manuel, Seoane, Natalia, Indalecio, Guillermo, Lindberg, Jari, Dettmer, Wulf, Peric, Djordje, Garcia-Loureiro, Antonio J., Kalna, Karol |
| المصدر: | 2016 Joint International EUROSOI Workshop & International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS); 2016, p52-55, 4p |
| قاعدة البيانات: | Complementary Index |
| ردمك: | 9781467386098 |
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| DOI: | 10.1109/ULIS.2016.7440050 |