Yield and reliability of 3DIC technology for advanced 28nm node and beyond.

التفاصيل البيبلوغرافية
العنوان: Yield and reliability of 3DIC technology for advanced 28nm node and beyond.
المؤلفون: Yang, K.F., Wu, T.J., Chiou, W.C., Chen, M.F., Lin, Y.C., Tsai, F.W., Hsieh, C.C., Chang, C.H., Wu, W.J., Chen, Y.H., Chen, T.Y., Wang, H.R., Lin, I.C., Jan, S.B., Wang, R.D., Lu, Y.J., Shih, Y.C., Teng, H.A., Tsai, C.S., Chang, M.N.
المصدر: 2011 Symposium on VLSI Technology (VLSIT); 2011, p140-141, 2p
قاعدة البيانات: Complementary Index