In this paper, a total solution of the analog sensing circuits with delta-sigma modulator for CMOS micro-accelerometers is designed. The proposed total solution is attractive due to that all the analog and digital block circuits for CMOS micro-accelerometers are robust and compact to be integrated. Based upon the device parameters of 0.35 µm 2P4M CMOS technology with 3 V power supply, all the functions and performance of the proposed total solution for CMOS micro-accelerometers are successfully tested and proven through SPICE simulations. The area of the analog sensing circuits with delta-sigma modulator is 1812 × 1420 µm2. The proposed total solution with CMOS micro-accelerometer is suitable for automobiles, consumer electronics, such as Wii game player.
