Patent
Process for manufacturing thin films by multi-layer deposition
| العنوان: | Process for manufacturing thin films by multi-layer deposition |
|---|---|
| Patent Number: | 5,648,321 |
| تاريخ النشر: | July 15, 1997 |
| Appl. No: | 08/120,984 |
| Application Filed: | September 13, 1993 |
| مستخلص: | Described is a process for manufacturing thin films by periodically depositing (DEP) a number of block layers consisting of different base materials on a substrate (multilayer deposition), wherein the thickness of the layers (LT) is restricted to one to 20 monolayers and deposition as well as crystallization of the thin film is completed at approximately constant temperature without performing a separate annealing step. The method can be used to produce thin films of high-T.sub.c -superconductors. It allows a better control of the crystal growth of ternary or higher compounds with comparatively large unit cells. |
| Inventors: | Bednorz, Johannes Georg (Wolfhausen, CHX); Catana, Andrei (Preverenges, CHX); Locquet, Jean Pierre (Kilchberg, CHX); Maechler, Erich (Siebnen, CHX); Mueller, Carl Alexander (Hedingen, CHX) |
| Assignees: | International Business Machines Corporation (Armonk, NY) |
| Claim: | We claim |
| Claim: | 1. Process for manufacturing a thin film of a solid compound of a high Tc superconductor from a plurality of base materials by periodic multilayer deposition on a substrate with the layer thickness ratio within each period being selected in accordance with the stoichiometric ratio of said solid compound, comprising the steps of |
| Claim: | depositing a first layer on said substrate |
| Claim: | depositing a second layer on said first layer; |
| Claim: | depositing a third layer on said second layer; |
| Claim: | the thickness of the thickest layer of said first layer, said second layer and said third layer is selected from a range between 2 and 20 monolayers; |
| Claim: | crystallizing said period of layers at an approximately constant temperature to said compound; and |
| Claim: | wherein said crystallizing said period of said layers to said compound is completed before depositing the next period of said layers. |
| Claim: | 2. A process in accordance with claim 1, wherein said period of layers comprises greater than two layers. |
| Claim: | 3. A process in accordance with claim 1, wherein two of said base materials are combined to form a binary compound before being deposited as one of said layers. |
| Claim: | 4. A process in accordance with claim 1, wherein the order of said layers within said period of layers is changed within subsequent deposition period of layers. |
| Claim: | 5. A process in accordance with claim 1, wherein said base materials are selected from the group consisting of group Ib, IIa-, IIIa-metals, Lanthanides, potassium, lead and their oxides. |
| Claim: | 6. A process in accordance with claim 1, wherein said period of layers are deposited by a method selected from the group consisting of molecular beam epitaxy (MBE), sputtering, laser ablation and metal-organic chemical vapor deposition (MOCVD). |
| Claim: | 7. A process in accordance with claim 1, wherein said compound has a unit cell with at least one axis exceeding 1 nm. |
| Current U.S. Class: | 505/473; 505/474; 505/475; 505/500; 505/729; 505/731; 505/732; 505/742; 427/62; 4272/557; 427/596 |
| Current International Class: | B05D 512; C23C 1400; C23C 1600 |
| Other References: | Webb et al, "Growth of high Tc superconducting thin films using molecular beam epitaxy techniques", Appl. Phys. lett. 51(15) Oct. 1987, pp. 1191-1193. Bae et al, "Molecular beam deposition of Dy.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-8 (001) high-temperature superconductor thin films", J. Vac. Sci. Technol. A 10(2) Mar./Apr. 1992 pp. 281-283. Hellman et al, "Molecular-beam epitaxy and deposition of high Tc superconductors", J. Vac. Sci. Technol. B6(2) Mar./Apr. 1988 pp. 799-803. |
| Primary Examiner: | King, Roy V. |
| Attorney, Agent or Firm: | Morris, Daniel P. |
| رقم الانضمام: | edspgr.05648321 |
| قاعدة البيانات: | USPTO Patent Grants |
| الوصف غير متاح. |