دورية أكاديمية
Nanofabrication of Three-Dimensional Imprint Diamond Molds by ECR Oxygen Ion Beams Using Polysiloxane
العنوان: | Nanofabrication of Three-Dimensional Imprint Diamond Molds by ECR Oxygen Ion Beams Using Polysiloxane |
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المؤلفون: | Hirofumi Takikawa, Shuji Kiyohara, Tomoyuki Kashiwagi, Yoshinari Sugiyama, Yoshio Taguchi, Yuichi Kurashima |
المصدر: | e-Journal of Surface Science and Nanotechnology. 2009, 7:772 |
قاعدة البيانات: | J-STAGE |
تدمد: | 13480391 |
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DOI: | 10.1380/ejssnt.2009.772 |