Fabrication of Sio2-based microcantilevers by anisotropic chemical etching of (100) single crystal Si
| العنوان: | Fabrication of Sio2-based microcantilevers by anisotropic chemical etching of (100) single crystal Si |
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| المؤلفون: | Jović Vesna, Lamovec Jelena, Popović Mirjana, Lazić Žarko |
| الوصول الحر: | http://europeana.eu/portal/record/92040/BibliographicResource_1000095953500.htmlTest |
| قاعدة البيانات: | Europeana |
| الوصف غير متاح. |