دورية أكاديمية
The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process
| العنوان: | The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process |
|---|---|
| المؤلفون: | Lee, Taehoon, Min, Nam-Ki, Lee, Hyun Woo, Jang, JinNyoung, Lee, DongHyuck, Hong, MunPyo, Kwon, Kwang-Ho |
| المصدر: | Thin Solid Films ; volume 517, issue 14, page 3999-4002 ; ISSN 0040-6090 |
| بيانات النشر: | Elsevier BV |
| سنة النشر: | 2009 |
| المجموعة: | ScienceDirect (Elsevier - Open Access Articles via Crossref) |
| مصطلحات موضوعية: | Materials Chemistry, Metals and Alloys, Surfaces, Coatings and Films, Surfaces and Interfaces, Electronic, Optical and Magnetic Materials |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1016/j.tsf.2009.01.112 |
| الإتاحة: | https://doi.org/10.1016/j.tsf.2009.01.112Test https://api.elsevier.com/content/article/PII:S0040609009001965?httpAccept=text/xmlTest https://api.elsevier.com/content/article/PII:S0040609009001965?httpAccept=text/plainTest |
| حقوق: | https://www.elsevier.com/tdm/userlicense/1.0Test/ |
| رقم الانضمام: | edsbas.57256562 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1016/j.tsf.2009.01.112 |
|---|