التفاصيل البيبلوغرافية
| العنوان: |
Dual-function circular polarization converter for microwave/plasma processing systems |
| المؤلفون: |
Chang, T.H., Barnett, L.R., Chu, K.R., Tai, F., Hsu, C.L. |
| المساهمون: |
朱國瑞 |
| بيانات النشر: |
American Institute of Physics |
| سنة النشر: |
1999 |
| المجموعة: |
National Tsing Hua University Institutional Repository (NTHUR) |
| مصطلحات موضوعية: |
antennas in plasma, circular waveguides, electromagnetic wave polarisation, mode matching, plasma electromagnetic wave propagation, plasma materials processing, plasma production, plasma radiofrequency heating, rectangular waveguides |
| الوقت: |
33 |
| الوصف: |
2010126010078 ; 物理系 ; Generation of a uniform density plasma has been a key consideration in the design of microwave/plasma processing systems. A circularly polarized wave can generate a plasma with good azimuthal uniformity as well as provide strong resonant interaction with the plasma electrons. In this article, we report the development of a three-port polarization converter which efficiently converts the TE10 wave of a standard rectangular waveguide into a circularly polarized TE11 wave of a cylindrical waveguide. Employing the same principle for mode conversion, the converter is also made to function as a protective device of the high power microwave source by providing a separate port for the return and damping of the reflected wave. Such a converter has been analyzed, constructed, and tested. At the operating frequency of 2.45 GHz, test results indicate a 25 dB return loss, 97% end-to-end polarization conversion efficiency, and better than 20 dB rejection of the reflected wave. The structural simplicity of the device allows high power operation as well as easy construction for system research and applications. |
| نوع الوثيقة: |
journal/newspaper |
| اللغة: |
English |
| تدمد: |
0034-6748 |
| العلاقة: |
REVIEW OF SCIENTIFIC INSTRUMENTS, American Institute of Physics, Volume 70, Issue 2, FEB 1999, Pages 1530-1534; http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/54429Test |
| الإتاحة: |
http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/54429Test |
| رقم الانضمام: |
edsbas.E8B1EFD9 |
| قاعدة البيانات: |
BASE |
