التفاصيل البيبلوغرافية
| العنوان: |
Metallic wafer bonding for the fabrication of long-wavelength vertical-cavity surface-emitting lasers |
| المؤلفون: |
H.C. Lin, K.L. Chang, K. C. Hsieh, W. H. Wang, K. Y. Cheng |
| المساهمون: |
鄭克勇 |
| بيانات النشر: |
American Institute of Physics |
| سنة النشر: |
2002 |
| المجموعة: |
National Tsing Hua University Institutional Repository (NTHUR) |
| مصطلحات موضوعية: |
gold alloys, germanium alloys, nickel alloys, chromium alloys, wafer bonding, surface treatment, semiconductor-metal boundaries, gallium arsenide, indium compounds, III-V semiconductors, surface emitting lasers, distributed Bragg reflector lasers, transmission electron microscopy, annealing, atomic force microscopy, surface topography, reflectivity |
| الوقت: |
45 |
| الوصف: |
2030161010042 ; 電機工程學系 ; A novel metallic bonding method using AuGeNiCr as the bonding medium was developed for the fabrication of long-wavelength vertical-cavity surface-emitting lasers (VCSELs). The metallic bonding process can be performed at a low temperature of 320 °C within 1 h and it does not require chemical-mechanical polishing or etching treatments on the bonding surfaces. As determined by atomic force microscopy, the process can tolerate a surface roughness of ∼10 nm on the surface of bonding samples. Cross-sectional transmission electron microscopy shows that the bonding interface is smooth and damage-free. Using this bonding technique, a 1.55 μm GaInAsP/InP VCSEL structure with Al-oxide/Si distributed Bragg reflectors was demonstrated on a Si substrate. No degradation was found on the bonded VCSEL structure after annealing at 420 °C. The reflectivity and resonance measured from the bonded VCSEL cavity confirmed the high optical quality provided by this bonding process for device fabrication. |
| نوع الوثيقة: |
journal/newspaper |
| اللغة: |
English |
| تدمد: |
0021-8979 |
| العلاقة: |
Journal of Applied Physics, American Institute of Physics, Volume 92, Issue 7, Oct 2002, Pages 4132-4134; http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/71942Test |
| الإتاحة: |
http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/71942Test |
| رقم الانضمام: |
edsbas.6CFFA1D6 |
| قاعدة البيانات: |
BASE |
