التفاصيل البيبلوغرافية
| العنوان: |
Optimization of a 65 nm CMOS imaging process for monolithic CMOS sensors for high energy physics |
| المؤلفون: |
Snoeys, Walter, Aglieri Rinella, Gianluca, Andronic, Anton, Antonelli, Matias, Baccomi, Roberto, Ballabriga Sune, Rafael, Barbero, Marlon, Barrillon, Pierre, Baudot, Jerome, Becht, Pascal, Benotto, Franco, Beolé, Stefania, Bertolone, Gregory, Besson, Auguste, Bialas, Wojciech, Borghello, Giulio, Braach, Justus, Buckland, Matthew Daniel, Bugiel, Szymon, Buschmann, Eric, Camerini, Paolo, Campbell, Michael, Carnesecchi, Francesca, Cecconi, Leonardo, Charbon, Edoardo, Chauhan, Ankur, Colledani, Claude, Contin, Giacomo, Dannheim, Dominik, Dort, Katharina, de Melo, João Pacheco, Deng, Wenjing, De Robertis, Giuseppe, Di Mauro, Antonio, Dorda Martin, Ana, Dorokhov, Andrei, Dorosz, Piotr, Eberwein, Gregor, El Bitar, Ziad, Fang, Xiaochao, Fenigstein, Amos, Ferrero, Chiara, Fougeron, Denis, Gajanana, Deepak, Goffe, Mathieu, Gonella, Laura, Grelli, Alessandro, Gromov, Vladimir, Habib, Alexandre, Haim, Adi, Hansen, Karsten, Hasenbichler, Jan, Hillemanns, Hartmut, Hong, Geun Hee, Hu, Christine, Isakov, Artem, Jaaskelainen, Kimmo, Junique, Antoine, Kotliarov, Artem, Kremastiotis, Iraklis, Krizek, Filip, Kluge, Alexander, Kluit, Ruud, Kucharska, Gabriela, Kugathasan, Thanushan, Kwon, Youngil, La Rocca, Paola, Lautner, Lukas, Leitao, Pedro Vicente, Lim, Bong-hwi, Loddo, Flavio, Mager, Magnus, Marras, Davide, Martinengo, Paolo, Masciocchi, Silvia, Mathew, Soniya, Menzel, Marius Wilm, Morel, Frederic, Mulyanto, Budi, Münker, Magdalena, Musa, Luciano, Nakamura, Masayuki, Pangaud, Patrick, Perciballi, Stefania, Pham, Hung, Piro, Francesco, Prino, Francesco, Rachevski, Sasha, Rebane, Karolina, Reckleben, Christian, Reidt, Felix, Ricci, Riccardo, Russo, Roberto, Sanna, Isabella, Sarritzu, Valerio, Savino, Umberto, Schledewitz, David, Sedgwick, Iain, Soltveit, Hans Kristian, Senyukov, Serhiy, Sonneveld, Jory, Soudier, Jean, Stachel, Johanna, Suzuki, Masakatsu, Svihra, Peter, Suljic, Miljenko, Takahashi, Nobuyoshi, Termo, Gennaro, Tiltmann, Nicolas, Toledano, Elie, Triffiro, Antonio, Turcato, Andrea, Usai, Gianluca, Valin, Isabella, Villani, Anna, Van Beelen, Jacob Bastiaan, Vassilev, Mirella Dimitrova, Vernieri, Caterina, Vitkovskiy, Arseniy, Wu, Yitao, Yelkenci, Asli, Yuncu, Alperen |
| المصدر: |
ISSN: 1824-8039. |
| بيانات النشر: |
Scuola Internazionale Superiore di Studi Avanzati |
| سنة النشر: |
2023 |
| المجموعة: |
KITopen (Karlsruhe Institute of Technologie) |
| مصطلحات موضوعية: |
ddc:620, Engineering & allied operations, info:eu-repo/classification/ddc/620 |
| الوصف: |
The long term goal of the CERN Experimental Physics Department R&D on monolithic sensors is the development of sub-100nm CMOS sensors for high energy physics. The first technology selected is the TPSCo 65nm CMOS imaging technology. A first submission MLR1 included several small test chips with sensor and circuit prototypes and transistor test structures. One of the main questions to be addressed was how to optimize the sensor in the presence of significant in-pixel circuitry. In this paper this optimization is described as well as the experimental results from the MLR1 run confirming its effectiveness. A second submission investigating wafer-scale stitching has just been completed. This work has been carried out in strong synergy with the ITS3 upgrade of the ALICE experiment. |
| نوع الوثيقة: |
article in journal/newspaper
conference object |
| وصف الملف: |
application/pdf |
| اللغة: |
English |
| ردمك: |
978-1-00-015931-8
1-00-015931-0 |
| العلاقة: |
Pos proceedings of science; info:eu-repo/semantics/altIdentifier/issn/1824-8039; https://publikationen.bibliothek.kit.edu/1000159310Test; https://publikationen.bibliothek.kit.edu/1000159310/150824130Test; https://doi.org/10.5445/IR/1000159310Test |
| DOI: |
10.5445/IR/1000159310 |
| الإتاحة: |
https://doi.org/10.5445/IR/1000159310Test
https://doi.org/10.22323/1.420.0083Test
https://publikationen.bibliothek.kit.edu/1000159310Test
https://publikationen.bibliothek.kit.edu/1000159310/150824130Test |
| حقوق: |
https://creativecommons.org/licenses/by-nc-nd/4.0/deed.deTest ; info:eu-repo/semantics/openAccess |
| رقم الانضمام: |
edsbas.E398E466 |
| قاعدة البيانات: |
BASE |
