دورية أكاديمية
Single pulse femtosecond laser ablation of silicon – a comparison between experimental and simulated two-dimensional ablation profiles
| العنوان: | Single pulse femtosecond laser ablation of silicon – a comparison between experimental and simulated two-dimensional ablation profiles |
|---|---|
| المؤلفون: | Moser, Regina, Domke, Matthias, Winter, Jan, Huber, Heinz P., Marowsky, Gerd |
| المصدر: | Advanced Optical Technologies ; volume 7, issue 4, page 255-264 ; ISSN 2192-8584 2192-8576 |
| بيانات النشر: | Frontiers Media SA |
| سنة النشر: | 2018 |
| المجموعة: | Frontiers (Publisher - via CrossRef) |
| مصطلحات موضوعية: | Instrumentation, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials |
| الوصف: | Ultrashort laser pulses are widely used for the precise structuring of semiconductors like silicon (Si). We present here, for the first time, a comparative study of experimentally obtained and numerically simulated two-dimensional ablation profiles based on parameters of commercially relevant and widely used near-infrared and diode pumped femtosecond lasers. Single pulse laser ablation was studied at a center wavelength of 1040 nm and pulse duration of 380 fs (FWHM) in an irradiating fluence regime from 1 J/cm 2 to 10 J/cm 2 . Process thresholds for material transport and removal were determined. Three regimes, scaling with the fluence, could be identified: low and middle fluence regimes and a hydrodynamic motion regime. By comparing the simulated and experimental ablation profiles, two conclusions can be drawn: At 2 J/cm 2 , the isothermal profile of 3800 K is in excellent agreement with the observed two-dimensional ablation. Thus exceeding a temperature of 3800 K can be accepted as a simplified ablation condition at that fluence. Furthermore, we observed a distinct deviation of the experimental from the simulated ablation profiles for irradiated fluences above 4 J/cm 2 . This points to hydrodynamic motion as an important contributing mechanism for laser ablation at higher fluences. |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1515/aot-2018-0013 |
| DOI: | 10.1515/aot-2018-0013/xml |
| DOI: | 10.1515/aot-2018-0013/pdf |
| الإتاحة: | https://doi.org/10.1515/aot-2018-0013Test http://www.degruyter.com/view/j/aot.2018.7.issue-4/aot-2018-0013/aot-2018-0013.xmlTest |
| رقم الانضمام: | edsbas.5C07631C |
| قاعدة البيانات: | BASE |
| DOI: | 10.1515/aot-2018-0013 |
|---|