دورية أكاديمية
Reactive pulsed direct current magnetron sputtering deposition of semiconducting yttrium oxide thin film in ultralow oxygen atmosphere: A spectroscopic and structural investigation of growth dynamics
| العنوان: | Reactive pulsed direct current magnetron sputtering deposition of semiconducting yttrium oxide thin film in ultralow oxygen atmosphere: A spectroscopic and structural investigation of growth dynamics |
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| المؤلفون: | Arslan, H., Aulika, Ilze, Sarakovskis, Anatolijs, Bikse, Liga, Zubkins, Martins, Azarov, A., Gabrusenoks, Jevgenijs, Purans, Juris |
| بيانات النشر: | Elsevier |
| سنة النشر: | 2023 |
| المجموعة: | E-resource repository of the University of Latvia / Latvijas Universitātes e-resursu repozitorijs |
| مصطلحات موضوعية: | Research Subject Categories::NATURAL SCIENCES::Physics, Rare-earth oxides, Reactive pulsed-DC magnetron sputtering, Yttrium monoxide, Phase transition |
| الوصف: | This study was financially supported by ERDF project No. 1.1.1.1/21/A/050“Large area deposition technologies of multifunctional antibacterial and antiviral nano-coatings”. Institute of Solid State Physics, University of Latvia as the Centre of Excellence has received funding from the European Union's Horizon 2020 Framework Programme H2020-WIDESPREAD-01-2016- 2017-TeamingPhase2 under grant agreement No. 739508, project CAMART2. The Research Council of Norway is acknowledged for the support to the Norwegian Micro- and Nano-Fabrication Facility, NorFab, project No. 295864. ; An experimental investigation was conducted to explore spectroscopic and structural characterization of semiconducting yttrium oxide thin film deposited at 623 K (±5K) utilizing reactive pulsed direct current magnetron sputtering. Based on the results obtained from both x-ray diffraction and transmission electron microscope measurements, yttrium monoxide is very likely formed in the transition region between β-Y2O3 and α-Y2O3, and accompanied by the crystalline Y2O3. Resulting from either the low energy separation between 4d and 5s orbitals and/or different spin states of the corresponding orbitals’ sublevels, the stability of monoxide is most presumably self-limited by the size of the crystal in thermodynamic terms. This behavior develops a distortion in the structure of the crystal compared to the metal oxide cubic structure and it also effectuates the arrangement in nanocrystalline/amorphous phase. In addition to this, spectroscopic ellipsometry denotes that the semiconducting yttrium oxide has the dominant, mostly amorphous, formation character over crystalline Y2O3. Our purpose, by means of the current findings, is to advance the understanding of formation kinetics/conditions of yttrium with an unusual valency (2+). --//-- This is an open access article H. Arslan, I. Aulika, A. Sarakovskis, L. Bikse, M. Zubkins, A. Azarov, J. Gabrusenoks, J. Purans, Reactive pulsed direct current magnetron sputtering deposition of semiconducting yttrium ... |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| تدمد: | 0042-207X |
| العلاقة: | info:eu-repo/grantAgreement/EC/H2020/739508/EU/Centre of Advanced Material Research and Technology Transfer/CAMART²; Vacuum;211; 111942; https://www.sciencedirect.com/science/article/pii/S0042207X23001392?via%3DihubTest; https://dspace.lu.lv/dspace/handle/7/65491Test |
| DOI: | 10.1016/j.vacuum.2023.111942 |
| الإتاحة: | https://doi.org/10.1016/j.vacuum.2023.111942Test https://dspace.lu.lv/dspace/handle/7/65491Test https://www.sciencedirect.com/science/article/pii/S0042207X23001392?via%3DihubTest |
| حقوق: | info:eu-repo/semantics/openAccess |
| رقم الانضمام: | edsbas.684854A4 |
| قاعدة البيانات: | BASE |
| تدمد: | 0042207X |
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| DOI: | 10.1016/j.vacuum.2023.111942 |