التفاصيل البيبلوغرافية
العنوان: |
Submicron Structures Technology and Research |
المؤلفون: |
Anderson, Erik H., Plotnik, Irving, Schattenburg, Mark L., Melngailis, John, Smith, Henry I., Kwasnick, Robert F., Licini, Jerome C., Kastner, Marc A., Lee, Patrick A., Warren, Alan C., Antoniadis, Dimitri A., Chou, Stephen Y., Shahidi, Ghavam G., Ippen, Erich P., Palmer, Joyce E., Wong, Chee C., Yonehara, Takao, Garrison, Stephen M., Atwater, Harry A., Thompson, Carl V., Schott, Stephen C., Canizares, Claude R., Stein, Josephine A., Summa, Deborah A., Rajchman, Jan A., Paynter, Henry M., Chen, Dong-Pei, Haus, Hermann A. |
بيانات النشر: |
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
سنة النشر: |
1985 |
المجموعة: |
DSpace@MIT (Massachusetts Institute of Technology) |
مصطلحات موضوعية: |
Submicron Structures Technology, Submicron Structures Research, Submicron Structures Laboratory, Microfabrication at Linewidths of 0.1 μm and Below, Electronic Conduction in Ultra-Narrow Silicon Inversion Layers, Corrugated Gate MOS Structures, Submicron FET's in Si, Submicron-Gap High-Mobility Silicon Picosecond Photodetectors, Graphoepitaxy of Si, Graphoepitaxy of Ge, Graphoepitaxy of Model Materials, Zone-Melting Recrystallization of Si for Solar Cells, Integration of Si and Ill-V Materials, Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy, High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy, Display Based on Switchable Zero Order Diffraction Grating Light Valves, Surface Acoustic Wave Propagation in Gratings, Near IR Grating Polarizers |
الوصف: |
Contains reports on fourteen research projects. ; Joint Services Electronics Program (Contract DAAG29-83-K-0003) ; U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) ; National Science Foundation (Grant ECS82-05701) ; Semiconductor Research Corporation (Grant 83-01-033) ; U.S. Department of Energy (Contract DE-ACO2-82-ER-13019) ; Lawrence Livermore National Laboratory (Contract 2069209) ; National Aeronautics and Space Administration (Contract NAS5-27591) ; Defense Advanced Research Projects Agency (Contract N00014-79-C-0908) ; National Science Foundation (Grant ECS80-17705) ; National Aeronautics and Space Administration (Contract NGL22-009-638) |
نوع الوثيقة: |
report |
وصف الملف: |
application/pdf |
اللغة: |
English |
العلاقة: |
Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1985; Submicron Structures Technology and Research; Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127; RLE_PR_127_01; http://hdl.handle.net/1721.1/56933Test |
الإتاحة: |
http://hdl.handle.net/1721.1/56933Test |
حقوق: |
Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. |
رقم الانضمام: |
edsbas.8F8EBA3A |
قاعدة البيانات: |
BASE |