رسالة جامعية
Microelectromechanical resonator-based components for wireless communications : filters and transmission lines ; Mikromekaanisiin resonaattoreihin perustuvat komponentit langattoman tiedonsiirron sovelluksissa. Suodattimet ja siirtolinjat
| العنوان: | Microelectromechanical resonator-based components for wireless communications : filters and transmission lines ; Mikromekaanisiin resonaattoreihin perustuvat komponentit langattoman tiedonsiirron sovelluksissa. Suodattimet ja siirtolinjat |
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| المؤلفون: | Alastalo, Ari |
| المساهمون: | Department of Engineering Physics and Mathematics, Teknillisen fysiikan ja matematiikan osasto, Aalto-yliopisto, Aalto University |
| بيانات النشر: | VTT Technical Research Centre of Finland VTT |
| سنة النشر: | 2006 |
| المجموعة: | Aalto University Publication Archive (Aaltodoc) / Aalto-yliopiston julkaisuarkistoa |
| مصطلحات موضوعية: | Physics, Electrical engineering, MEMS, radio-frequency MEMS, microelectromechanical filters, microelectromechanical resonators, components, transducers, wireless communication, transmission lines, acoustic wave propagation, intermodulation |
| الوصف: | Starting in the early 1960's, when the integrated-circuit (IC) technology was developed, micromachining and microelectromechanical systems (MEMS) have grown into a broad research field with several commercial successes. Typical applications of MEMS are in physical, chemical and biochemical sensors, as well as in optical systems such as the digital micromirror device of Texas Instruments. From the 1990's, the advances in the processing technologies and the tremendous growth of the wireless-communication market have drawn much interest into radio-frequency MEMS devices (RF MEMS) such as filters, oscillators, switches and tunable capacitors. These are now beginning to penetrate the market. This thesis considers electrostatically-actuated RF-MEMS filters and delay lines. For filters, the work concentrates on nonlinear distortion and filter design. The intermodulation properties of capacitively-coupled MEMS filters are analytically solved in closed form and the theory is verified in numerical simulations as well as in measurements with MEMS resonators. The analysis is more generally valid than the previously published results. The theory is utilized to formulate a design procedure for MEMS filters that, for the first time, takes systems speci-fications for tolerable intermodulation distortion and insertion-loss into account. For delay lines, capacitive actuation of bulk-acoustic waves in a solid rod is analyzed. In particular, challenges in impedance matching due to the weakness of the electrostatic coupling are quantified. Finally, a new kind of resonator-chain delay line for high-frequency (HF) signals is introduced. This delay line is characterized by extremely slow signal group velocity (∼ 10-100 m/s), narrow-band response, and much lower characteristic impedance than found for the solid-rod waveguide enabling efficient signal coupling. Properties of the resonator-chain waveguide are theoretically analyzed and the results are verified in measurements of fabricated devices. ; Mikroelektromekaanisten järjestelmien ... |
| نوع الوثيقة: | doctoral or postdoctoral thesis |
| وصف الملف: | 57, [56]; application/pdf |
| اللغة: | English |
| ردمك: | 978-951-38-6866-6 951-38-6866-4 |
| تدمد: | 1455-0849 |
| العلاقة: | VTT publications; 616; Ari T. Alastalo and Ville Kaajakari, Intermodulation in Capacitively Coupled Microelectromechanical Filters, IEEE Electron Device Letters, vol. 26, no. 5, pp. 289-291, May 2005. [article1.pdf] © 2005 IEEE. By permission.; Ari T. Alastalo and Ville Kaajakari, Third-Order Intermodulation in Microelectromechanical Filters Coupled with Capacitive Transducers, IEEE Journal of Microelectromechanical Systems, vol. 15, no. 1, pp. 141-148, February 2006. [article2.pdf] © 2006 IEEE. By permission.; Ari T. Alastalo and Ville Kaajakari, Systematic Design Approach for Capacitively Coupled Microelectromechanical Filters, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 53, no. 9, pp. 1662-1670, September 2006. [article3.pdf] © 2006 IEEE. By permission.; Ari T. Alastalo, Tomi Mattila, and Heikki Seppä, Analysis of a MEMS Transmission Line, IEEE Transactions on Microwave Theory and Techniques, vol. 51, no. 8, pp. 1977-1981, August 2003. [article4.pdf] © 2003 IEEE. By permission.; Ari T. Alastalo, Tomi Mattila, Heikki Seppä, and James Dekker, Micromechanical slow-velocity delay lines, Proceedings of the 33rd European Microwave Conference, Munich, Germany, 6-10 October, 2003, pp. 967-970. [article5.pdf] © 2003 European Microwave Association. By permission.; Ari T. Alastalo, Jyrki Kiihamäki, and Heikki Seppä, Microelectromechanical delay lines with slow signal propagation, Journal of Micromechanics and Microengineering, vol. 16, pp. 1854-1860, August 2006. [article6.pdf] © 2006 Institute of Physics Publishing. By permission.; 951-38-6866-4; https://aaltodoc.aalto.fi/handle/123456789/2738Test; urn:nbn:fi:tkk-008038 |
| الإتاحة: | https://aaltodoc.aalto.fi/handle/123456789/2738Test |
| رقم الانضمام: | edsbas.E7F2057D |
| قاعدة البيانات: | BASE |
| ردمك: | 9789513868666 9513868664 |
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| تدمد: | 14550849 |