التفاصيل البيبلوغرافية
| العنوان: |
Electrical properties of magnesium oxide layers with different surface pretreatment on high mobility Ge1−x Sn x and Ge MOS capacitors. |
| المؤلفون: |
Su, Chen-Yi1 chenyi.su@fys.kuleuven.be, Lieten, Ruben1,2, Bakalov, Petar1, Tseng, Wei-Jhih2, Dillemans, Leander1, Menghini, Mariela1, Smets, Tomas1, Seo, Jin Won3, Locquet, Jean-Pierre1 |
| المصدر: |
Applied Surface Science. Feb2014, Vol. 291, p31-34. 4p. |
| مصطلحات موضوعية: |
*MAGNESIUM oxide, *ELECTRIC properties of metals, *SURFACE chemistry, *GERMANIUM compounds, *CAPACITORS, *SURFACE preparation |
| مستخلص: |
Highlights: [•] MgO was grown on high mobility GeSn and Ge by MBE. [•] We characterized the electrical properties of MOS capacitors. [•] Chemical and oxygen species effects prior to oxide deposition were studied. [•] Ozone treatment leads to low gate leakage. [ABSTRACT FROM AUTHOR] |
| قاعدة البيانات: |
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